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 Large array MMIC feedthrough

Details
Inventors: Trinh, Trang N.; Smith, Jr., Elroy C.;
Assignee: Rockwell International Corporation (Seal Beach)
Primary Examiner: LaRoche; Eugene R.
Assistant Examiner: Ham; Seurg
Attorney, Agent or Firm: Hamann; H. Fredrick, Montanye; George A., Streeter; Tom

A method and apparatus are disclosed for manufacturing large Monolithic Microwave Integrated Circuit (MMIC) arrays. MMIC elements are manufactured on a substrate to form a MMIC module and first conductive vias are created in the substrate at locations corresponding to contact points for the MMIC. The MMIC module is then secured to a multi-layered ceramic backplate structure for physical rigidity and electrical interconnection. The MMIC module uses a conductive material, such as chrome, to fill or coat the vias to provide electrical contact with MMIC contact pads. Each layer of the multi-layered backplate structure has an electrical interconnection circuit or network formed thereon, and conductive vias extending through the layer at locations corresponding to preselected vias in adjacent layers and electrical contacts for MMIC modules. In further aspects of the invention, portions of the backplate also support phase control integrated circuit logic elements or devices which are electrically connected to the MMICs through the interconnection circuits to reduce off-structure connections. The backplate uses a multi-layer hybrid technique in conjunction with the via holes on the MMIC substrate to form a low cost and reliable feeding network for a large MMIC array, such as a phased-array. The invention uses RF power distribution structures in combination with advanced fabrication and assembly techniques to eliminate individually fabricated RF feedthroughs.

DETAILED DESCRIPTION What we claim as our invention is: 1.
A backplate apparatus for use with an array of monolithic microwave integrated circuits, comprising: a plurality of electrically insulating material layers secured together, each having conductive vias extending therethrough at locations corresponding to preselected electrical signal transfer points for circuitry on at least one of said monolithic microwave integrated circuits and each having an electrical interconnection circuit deposited thereon for connection to different selected ones of said conductive vias so as to transfer signals therewith; at least one of said electrical interconnection circuits deposited on one insulating layer comprising a power divider for physically connecting a single RF transfer line to a plurality of selected ones of said conductive vias corresponding to a plurality of physical RF transfer contacts for said monolithic microwave integrated circuit; and at least one of said electrical interconnection circuits deposited on an adjacent insulating layer comprising a ground plane for said power divider.
2.
A monolithic microwave integrated circuit array and backplate apparatus comprising: a multi-layer interface board comprising multiple layers of electrically insulating material, each having a predetermined thickness and a unique interconnection circuit deposited thereon; at least one first conductive via positioned across and extending through each insulating layer, each said via being electrically connected to one interconnection circuit; a monolithic microwave integrated circuit module comprising a generally planar substrate having opposing first and second generally planar surfaces with a desired monolithic microwave integrated circuit formed adjacent said first surface; second conductive vias extending through said substrate between said first and second surfaces at locations corresponding to, and in alignment with, desired signal contact points for said monolithic microwave integrated circuit; and joining means connected between said substrate second surface and said interface board for holding said substrate on said interface board with said first conductive vias in alignment and physical contact with corresponding ones of said second conductive vias, so as to provide signal transfer paths between said unique interconnection circuits and preselected ones of said circuit signal contacts



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