 Elastic buffer for local area networks |
| According to the present invention there is provided an elastic buffer for absorbing frequency ... |
|
| Demodulator with composite transversal equalizer and eye detection clock synchronizer |
| It is therefore advantageous to combine the capabilities of both digital transversal equalizers and ... |
|
| Deep diode atomic battery |
| We claim as our invention: 1. A deep diode atomic battery comprising: a body of single crystal ... |
|
| Light emitting polymer electrical energy source |
| We claim: 1. An electrical energy source, comprising: a light emitting polymer material having at ... |
|
| Current collector for lithium ion battery |
| An improvement in lithium ion batteries has been found whereby an electrically conductive, ... |
|
| Video amplitude related measurements in image analysis |
| In this invention, the analog video signal from the scanner is digitized at numerous specific ... |
|
| Automated plate reader |
| The method of the present invention is applicable to all dilution assays, one example of which is ... |
|
| Single wire light control system |
| What is claimed is: 1. In combination with a series of electrical devices and vehicle lights ... |
|
| Signal processing method and apparatus |
| It is an object of the present invention to provide an emphasis circuit and deemphasis circuit ... |
|
|
Driving control system and monitoring device for fan filter unit in semiconductor clean room
| Details |
Inventors: Hwang, Jung-sung; Choi, Jae-heung; Ahn, Yo-han; Lee, Dong-joo;
Assignee: Samsung Electronics, Co., Ltd. (Suwon, KR)
Primary Examiner: Hoff; Marc S.
Assistant Examiner: Bui; Bryan
Attorney, Agent or Firm: Jones Volentine, LLP
A monitoring device and a driving control system for a fan filter unit in a semiconductor clean room for monitoring the operating state of the fan filter unit. The monitoring device includes a switching section in each fan filter unit which alternately applies electrical power to one of a plurality of terminals. The switching section is responsive to a force from an air stream introduced therein via rotation of a fan in the fan filter unit. A display section in each fan filter unit is connected to the plurality of terminals which provide different signals, indicative of an on or off state of the fan, according to which of the plurality of terminals is electrically connected to the electrical power. |
|
DETAILED DESCRIPTION The present invention is directed to a driving control system and monitoring device for a fan filter unit for a semiconductor clean room, which substantially overcomes one or more of the problems due to limitations and disadvantages of the related art.
An object of the present invention is to provide a driving control system and monitoring device for the fan filter unit of the semiconductor clean room which can precisely monitor the operating state of the fan unit so as to maintain the cleanliness of the clean room to ensure high production yields.
To achieve this and other advantages, and in accordance with the purpose of the present invention, as embodied and broadly described, there is provided a monitoring device for a fan filter unit having a fan, a driving motor, and a filter in a semiconductor clean room, the monitoring device comprising: a switching section which alternately applies electrical power to one of a plurality of terminals, the switching section being responsive to an air stream introduced therein via rotation of the fan; and a display section connected to the plurality of terminals which provide different signals, indicative of an on or off state of the fan, according to which of the plurality of terminals is electrically connected to the electrical power.
The switching section includes a case equipped with an air inlet for introducing the air stream into the case, with a power terminal installed on one side of the case and the plurality of terminals being installed on an opposite side of the case.
A pivoting body is centrally installed between the power supply terminal and the plurality of terminals.
The pivoting body pivots around a longitudinal axis in response to a force exerted by the air stream introduced into the case.
The pivoting body is a flat conductive plate having first and second wings centered on the longitudinal axis, with the second wing being positioned below the air inlet.
An edge of the first wing electrically communicates with the power terminal and an edge of the second wing alternately communicates electrically with one of the plurality of terminals
|
| Related patents |
|
|
Catalytic cracking process
OF THE INVENTION The improved process and method of control of this invention applies particularly to FCC, i.e. fluid catalytic cracking. It relies on the use of a ...
|
|
|
Evaporation arc stabilization
OF PREFERRED EMBODIMENTS Reference should be made to the drawing where like reference numerals refer to like parts. Further, each of the figures of the drawing ...
|
|
|
Method and apparatus for evaporation arc stabilization for non-permeable targets utilizing permeable stop ring
OF PREFERRED EMBODIMENTS Reference should be made to the drawing where like reference numerals refer to like parts. Referring to FIG. 1, there is shown a non-permeable ...
|
|
|
Process of pretreatment prior to paint coating
OF PREFERRED EMBODIMENTS The description of the materials and methods used in the invention of prior U.S. Pat. No. 4,465,715 is hereby incorporated by reference. E...
|
|
|
Temperature control apparatus
What is claimed is: 1. In a machine for bonding two three-dimensional thermoplastic bodies together along a juncture zone, a thermal bonding blade assembly which is ...
|
|
|
Welding muff of thermoplastic material
I claim: 1. An electric welding muff for joining thermoplastic line elements, comprising a cylindrical welding sleeve formed of thermoplastic material; and an electrical ...
|
|
|
Method and apparatus for joining abutting edges of sheet material
In overcoming the problems of the prior art, the present invention provides a method of joining together abutting edges of woven, felted or other textile sheets, such as ...
|
|
|
Apparatus for fabricating honeycomb insulating material
Accordingly, it is an object of the present to provide apparatus for fabricating expandable and contractable honeycomb panels that are long lasting, relatively ...
|
|
|
Electron bombardment ion sources
We claim: 1. In an ion source which includes: means defining a chamber of conductive material for containing an ionizable gas within said chamber; an anode disposed ...
|
|
|
Treatment device utilizing plasma
OF THE PREFERRED EMBODIMENTS The treatment device utilizing plasma of the present invention has a structural member for forming the space for maintaining said plasma ...
|
|
|
Audio Signal Processing 
