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Details
Inventors: Takizawa, Teruyuki; Goto, Yoshikazu; Shimada, Toshiyuki;
Assignee: Matsushita Electric Industrial Co., Ltd. (Osaka, JP)
Primary Examiner: Shafer; Ricky D.
Assistant Examiner: Phan; James
Attorney, Agent or Firm: Wenderoth, Lind & Ponack

A mirror driving apparatus includes a rotary mirror, a support member for rotatably supporting the rotary mirror, a driving section for rotating the rotary mirror, a rotary electrode mounted on the rotary mirror or the support member, a fixed electrode disposed close to the rotary electrode and generally parallel thereto, a fixing section to which the support member and the fixed electrode are mounted, and a detecting section for detecting electrostatic capacity or a variation thereof between the rotary electrode and the fixed electrode. A mechanical vibration system, formed by the rotary mirror and the rotary mirror support member, is controlled based on the amount of rotary movement of the rotary mirror detecting as a change in capacity between the electrodes to suppress resonance of the rotary mirror. Additionally, by superposing an additional high frequency component outside the control band onto the rotary mirror control signal, the rotary mirror can be moved in fine increments. Thus, a dead band region (hysteresis characteristic) of the mechanical vibration system is limited.

DETAILED DESCRIPTION Accordingly, an essential object of the present invention is to provide a mirror driving apparatus which is capable of suppressing resonance of a rotary mirror without increasing a dead band region (hysteresis characteristic) of the rotary mirror.
Another object of the present invention is to provide a mirror driving device which has a simple structure, which functions stably with high reliability, and which can be readily manufactured at a low cost.
In accomplishing these and other objects, the present invention provides a mirror driving apparatus which includes a rotary mirror, a support member for rotatably supporting the rotary mirror, a driving section for rotating the rotary mirror, a rotary electrode mounted on the rotary mirror or the support member, a fixed electrode disposed close to the rotary electrode but spaced a small distance therefrom and extending generally parallel thereto, a fixing section to which the support member and fixed electrode are mounted, and a detecting section for detecting the electrostatic capacity between the rotary electrode and the fixed electrode.
The present invention also provides a mirror driving apparatus including a rotary mirror, a support member for rotatably supporting the rotary mirror, a driving section for rotating the rotary mirror, a driving electrical circuit controlling the driving section, and an adder for superposing an additional high frequency component of a specific frequency onto a rotary mirror driving control signal applied to the driving section by the driving electrical circuit.
By employing the rotary electrode that rotates together with the rotary mirror and the fixed electrode confronting the rotary electrode, the electrostatic capacity between the rotary electrode and the fixed electrode can be detected to determine the amount of rotation of the rotary mirror with high sensitivity.
Moreover, it becomes possible to apply an electrical feedback control to the rotary mirror driving section based on the detection signal



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