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Method for making a liquid crystal alignment layer
| Details |
Inventors: Chaudhari, Praveen; Galligan, Eileen Ann; Doyle, James Patrick; Lacey, James Andrew; Lien, Shui-Chih Alan; Nakano, Hiroki; Lu, Minhua;
Assignee: International Business Machines Corporation (Armonk, NY)
Primary Examiner: McPherson; John A.
Assistant Examiner:
Attorney, Agent or Firm: Ohlandt, Greeley, Ruggiero & Perle, LLP, Underweiser, Esq.; Marian
A method is disclosed for forming an alignment layer for use in a liquid crystal cell layer for use in a liquid crystal cell using an ion beam source that includes the steps of: (1) providing a substrate having a surface; (2) providing an ion beam source that emanates an ion beam; (3) providing a mask layer disposed between the substrate surface and the ion beam source. The mask layer has at least two openings disposed between the ion beam source and the substrate surface. The shape and position of the openings reduce the irregularity of the beam exposure in a border region on the surface of the substrate resulting from the ion beam source. The present invention may be used in conjunction with substrate treatment using multiple sweeps with a single ion beam source, or with a substrate treatment using a single sweep with multiple ion beam sources. Also disclosed is an apparatus for practicing the disclosed method. |
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DETAILED DESCRIPTION OF THE INVENTION The disclosure of commonly assigned U.
S.
Pat.
No.
5,770,826 to Chaudhari et al.
is incorporated by reference in its entirety.
FIG.
1 of U.
S.
Pat.
No.
5,770,826 provides a schematic drawing of an example of an ion beam system useful for the purpose of practicing this invention.
The present invention provides a method of using an ion beam system having an ion beam source to enhance uniformity of alignment on a surface of a substrate.
In particular, the problem solved by the present invention lies in the border region that results from either multiple sweeps with a single ion beam source or a single sweep with multiple ion beam sources.
FIG.
1 is a schematic diagram of a cross-section of a liquid crystal display cell.
As illustrated in FIG.
1 the liquid crystals are disposed between two alignment layers, specifically between the alignment surfaces of two alignment layers.
The quality of any liquid crystal display cell is dependent upon the uniformity of the alignment of the liquid crystal display.
Hence, providing uniform alignment surfaces is a critical element to manufacturing liquid crystal display cells.
Although the difficulties associated with using multiple ion source guns is known by those skilled in the art and has been described above, reference is made to FIGS.
2a through 6 for providing better appreciation of these difficulties.
In addition, the problem associated with multiple ion source guns is discussed below to assist those skilled in the art to appreciate the solution provided by the present invention.
To illustrate the principles of the present invention reference is made to using a diamond-like-carbon film (dlc) as the alignment layer.
In addition, an Argon source ion gun is run between 100 and 500 eV.
Typically, the ion source gun is positioned at a non-perpendicular angle to the surface of the alignment layer.
In the examples and figures discussed below, the angle is 35 degrees from the horizontal, but this particular angle should not be viewed as a limitation upon the practice of this invention
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