Polyamide containing the hexafluoroisopropylidene group and process of using to form a positive image

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS This invention is that of a high temperature polyamide containing the hexafluoroisopropylidene group.
These polyamide have the following general formula (1): ##STR2## where: X is the divalent group: ##STR3## a=0.
10 to 0.
50 mole fraction b=0.
25 to 0.
50 mole fraction c=0.
00 to 0.
40 mole fraction d=0.
00 to 0.
25 mole fraction where: a+b+c+d=1, said mole fractions being based upon the total moles of X+Y+Z in the polymer.
where: n is an integer from about 2-500; preferably 20-300 and for photoresist application most preferably about 5-200.
wherein R is independently selected from hydrogen and a substituted or unsubstituted aliphatic or aromatic monovalent group having up to nine carbons; preferably, R is selected from hydrogen, methyl, ethyl and phenyl.
The groups Y and Z are unsubstituted or a substituted aliphatic, aromatic or alicyclic divalent group having up to 60 carbons and mixtures thereof.
The divalent group Y is independently selected from methylene and difluoromethylene and both the divalent groups Y and Z are independently selected from polydifluoromethylene of 2 to 12 carbons; a substituted or unsubstituted polymethylene of 2 to 12 carbons; cyclohexylene; cyclohexenylene; piperazinylene; arylene; biarylene; napthalenylene; and polyarylene wherein the linking group (hereinafter W) between the arylene rings is independently selected from a single carbon to carbon bond; methylene; polymethylene of 2 to 12 carbons; difluoromethylene, polydifluoromethylene from 2 to 12 carbons; hexafluoroisopropylidene; isopropylidene; oxy; thio; sulfinyl; sulfonyl; sulfonyldioxy; sulfonamido; carbonyl; ##STR4## cyclohexylene; cyclohexenylene; naphthalenylene and mixtures thereof.
The substituent A is independently selected from substituted or unsubstituted: alkyl of 1 to 8 carbons, phenyl and naphthyl.
The group D is independently selected from: oxy, thio, carbonyl, oxycarbonyl, sulfonamido, sulfinyl, sulfony, sulfonyldioxy, benzenedicarbonyl, benzenedioxycarbonyl ##STR5## The integer n' is 1 to 25