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Method-and-apparatus-for-monitoring-the-location-of-wafer-disks

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Method and apparatus for monitoring the location of wafer disks

Details

Inventors: Rossi, Alexander N.; Sancen, Mario N.;
Assignee: Fluoroware, Inc. (Chaska, MN)
Primary Examiner: Pitts; Harold I.
Assistant Examiner:
Attorney, Agent or Firm: Faegre & Benson

A method and system for monitoring the process of a plurality of batches of semiconductor wafers or memory disks through a series of processing operations. Each batch is placed in a carrier in which it is transported to the locations where the processing operations are performed. Each carrier is provided with a transponder tag coded to be responsive to within reading range of a reader unit which transmits a radio frequency signal to the transponder tag and reads and decodes a phase modulated signal returned by the transponder tag to uniquely identify the carrier that is positioned within range of the reader unit. Further control apparatus receives information from the reader units to permit the monitoring process of semiconductor wafer or memory disk batches through multiple processing operations.

DETAILED DESCRIPTION What is claimed is: 1.
A method for monitoring the progress of a plurality of batches of disks through a multiplicity of operations at several locations comprising the steps of: inserting each batch of disks into a carrier constructed and arranged for supporting the disks in a parallel, axially arranged spaced array; providing each carrier with a transponder tag constructed, arranged and coded for uniquely identifying the carrier and the batch inserted therein; detecting the presence of each carrier at one of the several locations by operating a multiplicity of limited range reader units, each of which is positioned adjacent to one of the locations, the reader units being constructed and arranged for determining the identification cf any transponder tag within its detection range; and monitoring the progress of at least one batch of disks through various locations by updating and storing location information received from the reader units.
2.
A system for tracking batches of disks through a plurality of operations comprising: a plurality of carriers, each of which is adapted for carrying a batch of at least one disks; a plurality of transponder tags, each of which is mounted on the outside surface of a vertical wall of a carrier, each tag including a transmitting antenna oriented perpendicular to the plane of the disks; at least one remote recognition reader constructed and arranged for transmitting an RF signal to the transponder tag and receiving a coded RF response therefrom indicative of the identity of a particular batch of disks and providing an output signal characteristic thereof; and control means for receiving the output from the readers and providing a control signal indicative of which carrier is within the range of which reader.
3.
The invention of claim 2, wherein the transponder tag includes a surface acoustic wave crystal adapted for modifying the phase of a received signal in accordance with a predetermined code and wherein the crystal is inductively coupled to the antenna

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