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Device-for-testing-wafer-transporting-robot

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Device for testing wafer-transporting robot

Details

Inventors: Mori, Kunihiko; Ishikura, Taizo;
Assignee: Applied Materials, Inc. (Santa Clara, CA)
Primary Examiner: Raevis; Robot
Assistant Examiner:
Attorney, Agent or Firm: McDermott, Will & Emery

An inspection apparatus for inspecting the soundness of a substrate transfer robot of a type horizontally transferring a substrate such as a semiconductor wafer mounted on a blade. The inspection apparatus is efficiently used in a multi-chamber type semiconductor manufacturing apparatus and has a noncontact type distance sensor capable of measuring a vertical distance. When the upper face of a cassette stage disposed within a load-lock chamber is assumed to be a reference surface, the distance sensor in the inspection apparatus measures the vertical distance between the horizontal reference surface and the blade of robot moving above the reference surface. From thus measured value, the warp of blade and its shaking upon movement can be detected.

DETAILED DESCRIPTION What is claimed is: 1.
An inspection apparatus for inspecting a substrate transfer robot having a substantially horizontally movable blade on which a substrate is mounted, said inspection apparatus comprising a noncontact type distance sensor adapted to measure a vertical distance between a substantially horizontal reference surface and said blade moving above said reference surface.
2.
An inspection apparatus for a substrate transfer robot according to claim 1, wherein said distance sensor is attached to a holder adapted to be mounted on said reference surface, said blade being let in and out of said holder.
3.
An inspection apparatus for a substrate transfer robot according to claim 2, wherein said holder comprises a lower plate adapted to be mounted on said reference surface; an upper plate disposed parallel to said lower plate with a predetermined gap therebetween; and a pair of side plates, opposing each other, for connecting said upper and lower plates to each other, said distance sensor being attached to a lower face of said upper plate.
4.
An inspection apparatus for a substrate transfer robot according to claim 1, wherein two or more said distance sensors are arranged in parallel along a predetermined locus in which said blade advances linearly.
5.
An inspection apparatus for a substrate transfer robot according to claim 1, wherein three distance sensors are arranged in parallel in each of two rows along a predetermined locus in which said blade advances linearly.
6.
An inspection apparatus for a substrate transfer robot according to claim 1, further comprising display means for displaying distance data measured by said distance sensor.
7.
An inspection apparatus for a substrate transfer robot according to, claim 1, further comprising: blade position detecting means for detecting a horizontal position of said blade; and determination means for determining a state of said substrate transfer robot according to distance data measured by said distance sensor and positional data obtained by said blade position detecting means

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