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Indexer for magazine shelves of a magazine and wafer-shaped objects contained therein
| Details |
Inventors: Schlehahn, Volker; Schultz, Klaus;
Assignee: Jenoptik Aktiengesellschaft (Jena, DE)
Primary Examiner: Brahan; Thomas J.
Assistant Examiner:
Attorney, Agent or Firm: Perman & Green, LLP
An indexer for magazine shelves of a magazine and wafer-shaped objects contained therein has the object of ensuring accurate access in any desired and predeterminable magazine plane, also for magazines which are provided with an opening on only one removing and charging side, by means of an all-purpose indexing, wherein it is possible to differentiate between various standardized magazine and wafer formats. The magazine shelves and the wafer-shaped objects are detected by an optoelectronic sensor arrangement, at least a portion of which is designed as a distance measuring system. The indexer is applicable in the manufacture of integrated circuits, in particular, for handling wafer-shaped objects in the form of semiconductors and masks. |
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DETAILED DESCRIPTION Therefore, the problem arises of ensuring accurate access in any desired and predeterminable magazine plane, also for magazines which are provided with an opening on only one removing and charging side, by means of an all-purpose indexing, wherein it is possible to differentiate between various standardized magazine and wafer formats.
A primary object of the present invention is to overcome this stated problem.
This object is met, according to the invention, by an indexer for magazine shelves of a magazine and wafer-shaped objects contained therein, in particular semiconductor wafers and masks, the magazine and a first handling plane for removing and charging being adjustable vertically relative to one another for the processing of such wafer-shaped objects, with an optoelectronic sensor arrangement for detecting the objects and magazine shelves relative to a reference plane which is in a fixed relationship to the first handling plane, in that at least a part of the optoelectronic sensor arrangement is designed as a distance measuring system.
If the wafer-shaped objects are opaque frontwise from one edge to the other, the entire sensor arrangement can be designed as a distance measuring system which detects radiation scattered at the edges of the objects and magazine shelves.
In this case, the distance measuring system contains a transmitter and a receiver arranged at an open side of the magazine so that a bundle of measurement rays proceeding from the transmitter with its center ray lying in the reference plane detects successively the wafer-shaped objects and shelf-forming projections for the objects by means of the vertical adjustment of the magazine relative to the reference plane, the objects and the projections being distinguishable from one another because of the different distances relative to the transmitter As a result of the vertical adjustment, an image of the magazine shelves and of the wafer-shaped objects contained therein is generated by an amplitude modulation of the output signal
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