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Modularity system for computer assisted surgery
A medical system that includes a single medical device that can be controlled by one of two input devices....
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Modularity system for computer assisted surgery
A medical system that includes a single medical device that can be controlled by one of two input devices....
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Buffer storage apparatus for semiconductor wafer processing
It is an object of the present invention to overcome the disadvantages of the prior art by providing buffer storage apparatus which may be incorporated within a wafer ...
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Wafer processing cassette
The general purpose of the present invention is to provide a wafer cassette for processing of integrated circuit wafers such as silicon wafers or the like which provides ...
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Wafer positioning apparatus
Accordingly, a general object of the present invention is to provide a wafer positioning apparatus in which the disadvantages of prior such apparatus are eliminated. A ...
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Wafer carrier
A moldable plastic carrier for predictably and steadfastly locating the carrier and wafers therein upon wafer transfer equipment has an open top for insertion and ...
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Method for aligning wafers within a semiconductor wafer cassette
An object of this invention is to provide a method and apparatus for precisely aligning wafers within a cassette regardless of the condition or positional accuracy of ...
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Wafer tilt gauge
The present invention overcomes the shortcomings and deficiencies discussed above by providing a wafer tilt gauge including a base support, structure for temporarily ...
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Workpiece alignment structure and method
In accordance with one embodiment of this invention, in a wafer processing apparatus 30 (see FIG. 3) the wafers enter via entry chamber 31A, are transported by a robot ...
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System and method for automated positioning of a substrate in a processing chamber
OF THE PREFERRED EMBODIMENT 1. Overview of The System Assembly Although the following description describes the invention in terms of a semiconductor wafer, this is for ...
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