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Probe test apparatus
| Details |
Inventors: Kitamura, Yoshisuke; Nagasaka, Munetoshi;
Assignee: Tokyo Electron Limited (Tokyo, JP); Tokyo Electron Yamanashi Limited (Nirasaki, JP)
Primary Examiner: Wieder; Kenneth A.
Assistant Examiner: Bowser; Barry C.
Attorney, Agent or Firm: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
A probe test apparatus comprising a test section for testing a wafer, a cassette having an opening at one side through which the wafer is taken into and out of the cassette, grooves formed in inner faces of both sides of the cassette to hold wafers therein, and a convex member projected downward from the underside of the cassette, a stage on which the cassette is mounted keeping the wafers therein substantially horizontal, and holder members projected upward from the top of the cassette-mounted stage and having a recess into which the convex member of the cassette falls, wherein when the convex member is not fitted into the recess but contacted with the holder members, the wafers in the cassette are tilted and when it is fitted into the recess, they can be kept substantially horizontal in the cassette to thereby position the cassette relative to the test section. |
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DETAILED DESCRIPTION An object of the present invention is therefore to provide a probe test apparatus for enabling the operator to more easily mount the cassette on the cassette-mounted stage, to more reliably position it at its correct area on the stage and to more easily confirm by his eyes whether or not it is correctly positioned on the stage.
Another object of the present invention is to provide a probe test apparatus, simpler in the arrangement and shorter in the cycle time, and capable of detecting the size of a wafer on the passage through which the wafer is carried from the cassette to the wafer-mounted stage.
A probe test apparatus according to the present invention comprises a test section for testing a substrate; a cassette having an opening at one side through which the substrate is taken into and out of the cassette, grooves formed in inner faces of both sides of the cassette to hold substrates therein, and a convex portion projected downward from an underside of the cassette; a stage on which the cassette is mounted keeping the substrates therein substantially horizontal; and holder means projected upward from a top of the cassette-mounted stage and having a recess into which the convex portion of the cassette falls; wherein when the convex portion is not fitted into the recess but contacted with the holder means, substrates in the cassette are tilted, and when it falls in the recess, the substrates are kept substantially horizontal in the cassette to thereby position the cassette relative to the test section.
A probe test apparatus according to the present invention comprises a test section for testing a substrate; load means for taking the substrate, which is to be tested, out of a cassette; a sensor having an optical axis crossing a space through which the substrate taken out by the load means passes; calculating means for calculating the size of the substrate responsive to light detection signal applied from the sensor; alignment means for positioning the substrate relative to the test section on the basis of the substrate size calculated; and unload means for returning the substrate, which has been tested, from the test section into the cassette
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Control Computers 
