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Substrate-cassette-and-side-rail-therefor

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Substrate cassette and side rail therefor

Details

Inventors: Ishikawa, Toshio;
Assignee:
Primary Examiner: Johnson; Blair M.
Assistant Examiner:
Attorney, Agent or Firm: Price, Gess & Ubell

A side rail for closing each of side walls of a substrate cassette of a rectangular configuration is disclosed which is capable of preventing deformation of the side rail and a dimensional error thereof. The side rail includes a partition plate formed on a surface thereof with ribs for receiving a plurality of substrates therein in a manner to space them from each other. The ribs are arranged so as to define partition grooves therebetween. The side rails also includes a cover member arranged for covering the partition plate and including rib covers for covering the ribs and groove covers arranged between the rib covers for covering the partition grooves. Also, a substrate cassette having the side rails incorporated therein is disclosed.

DETAILED DESCRIPTION The present invention has been made in view of the foregoing disadvantages of the prior art.
Accordingly, it is an object of the present invention to provide a side rail for a substrate cassette which is capable of permitting deformation of the side rail and dimensional error thereof to be eliminated.
It is another object of the present invention to provide a side rail for a substrate cassette which is capable of permitting selection of a material therefor which minimizes production of particles due to the contact with substrates and prevents contamination of substrates by heavy metal.
It is still another object of the present invention to provide a side rail for a substrate cassette which is capable of minimizing generation of outer gas to substantially prevent the outer gas from adversely affecting substrates.
It is yet another object of the present invention to provide a side wall for a substrate cassette which is capable of minimizing charging of static electricity thereon to substantially prevent the electricity from adversely affecting peripheral equipments.
It is even another object of the present invention to provide a side wall for a substrate cassette which is capable of minimizing production of fine resin powders due to friction between resin and substrates and being decreased in manufacturing cost.
It is a further object of the present invention to provide a substrate cassette which is capable of permitting deformation of the cassette and dimensional error thereof to be eliminated.
It is a yet further object of the present invention to provide a substrate cassette which is capable of permitting selection of a material therefor which minimizes production of particles due to the contact with substrates and prevents contamination of substrates by heavy metal.
It is a yet further object of the present invention to provide a substrate cassette which is capable of minimizing generation of outer gas to substantially prevent the outer gas from adversely affecting substrates

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