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Wafer-positioning-system

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Wafer positioning system

Details

Inventors: Berken, Lloyd M.; Freerks, Frederik W.; Jarvi, William H.; Sahin, Hatice;
Assignee: Applied Materials, Inc. (Santa Clara, CA)
Primary Examiner: Envall, Jr.; Roy N.
Assistant Examiner: Garland; Steven R.
Attorney, Agent or Firm: Loeb & Loeb LLP

A wafer positioning system determines the position of a wafer during processing by monitoring the position of the wafer transport robot as the robot transports the wafer by one or more position sensors. The wafer positioning system incorporates a transparent cover on the surface of the wafer handling chamber and two optical position sensors disposed on the surface of the transparent cover. The position sensors direct light through the wafer handling chamber to reflectors near the floor of the chamber which reflect the light back to the position sensors. A detector within the position sensor detects when the beam path from the position sensor to the reflector is uninterrupted. As wafers are transported through the chamber, the edge of the transported wafer interrupts the position sensor beam path causing the output of the position sensor to switch states. When the position sensor output switches, the position of the wafer transport robot is measured. At least two data points are measured to establish the wafer position. If the wafer is not at its nominal position, the position of the wafer transport robot is adjusted to compensate for the wafer misalignment.

DETAILED DESCRIPTION A preferred embodiment of the present invention includes a wafer handling chamber having a vacuum sealable opening for admitting wafers from a region external to the wafer handling chamber.
At least one wafer processing chamber having an opening large enough to admit a wafer is attached to the wafer handling chamber.
A wafer storage apparatus having a plurality of locations for storing wafers is located within the wafer handling chamber.
In addition, this preferred embodiment of the present invention includes a wafer transport robot capable of translating a wafer along a first coordinate direction and along a second coordinate direction.
Preferably the wafer transport robot includes a blade adapted for carrying wafers.
At least one position sensor is disposed so as to detect an edge of a wafer being transported from the wafer storage apparatus to a position within the wafer handling chamber disposed away from the wafer storage apparatus.
In accordance with a further aspect of this preferred embodiment, the present invention includes means for determining a wafer position with respect to the wafer transport robot.
Yet a further aspect of the present invention includes means for adjusting the wafer transport robot to correct the positioning of a misaligned wafer.
More particularly, the position of a misaligned wafer can be adjusted by altering a set of coordinate positions corresponding to a predetermined destination position by an amount substantially equal and opposite to the wafer's misalignment.
Another preferred embodiment of the present invention includes a wafer handling chamber with at least a portion of one wall formed from a substantially transparent material.
A wafer storage apparatus within the wafer handling chamber has a plurality of locations for storing wafers.
Also included is a wafer transport robot capable of translating a wafer along a first coordinate direction and along a second coordinate direction.
Preferably, the wafer transport robot has a blade for carrying wafers

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