Workpiece alignment structure and method
In accordance with one embodiment of this invention, in a wafer processing apparatus 30 (see FIG. 3) the wafers enter via entry chamber 31A, are transported by a robot arm 14 to various process chamb... Read More
Inventors: Niewmierzycki, Leszek;, Assignee: |
System and method for automated positioning of a substrate in a processing chamber
OF THE PREFERRED EMBODIMENT 1. Overview of The System Assembly Although the following description describes the invention in terms of a semiconductor wafer, this is for illustration purposes only and... Read More
Inventors: Shmookler, Simon; Weinberg, Andrew G.; McGrath, Martin J.;, Assignee: Applied Materials, Inc. (Santa Clara, CA) |
Cassette loader having compound translational motion
The invention reduces the possibility of repetitive stress injury to a worker, especially to the worker's wrists, during the process of loading and unloading a cassette containing semiconductor substr... Read More
Inventors: Freerks, Frederik W.; Ames, Kenneth D.;, Assignee: Applied Materials, Inc. (Santa Clara, CA) |
Wafer positioning system
A preferred embodiment of the present invention includes a wafer handling chamber having a vacuum sealable opening for admitting wafers from a region external to the wafer handling chamber. At least o... Read More
Inventors: Berken, Lloyd M.; Freerks, Frederik W.; Jarvi, William H.; Sahin, Hatice;, Assignee: Applied Materials, Inc. (Santa Clara, CA) |
Probe test apparatus
An object of the present invention is therefore to provide a probe test apparatus for enabling the operator to more easily mount the cassette on the cassette-mounted stage, to more reliably position i... Read More
Inventors: Kitamura, Yoshisuke; Nagasaka, Munetoshi;, Assignee: Tokyo Electron Limited (Tokyo, JP); Tokyo Electron Yamanashi Limited (Nirasaki, JP) |
Method for co-registering semiconductor wafers undergoing work in one or more blind process modules
The present invention contemplates a method for co-registering a semiconductor wafer undergoing work in one or more blind process modules. This method relies on the ability to register a semiconductor... Read More
Inventors: Gardopee, George J.; Clapis, Paul J.; Prusak, Joseph P.; Poultney, Sherman K.;, Assignee: Integrated Process Equipment Corp. (Phoenix, AZ) |
Wafer transfer system having rotational capability
OF THE INVENTION A transfer system 10 according to the present invention is shown generally in FIG. 1. In the configuration shown, a plurality of carriers 12 are held in a storage device 14 on the op... Read More
Inventors: Wiesler, Mordechai; Weiss, Mitchell;, Assignee: PRI Automation, Inc. (Billerica, MA) |
Vacuum apparatus for the surface treatment of workpieces
The aim of the present invention is to remedy the disadvantages of the existing technology. In particular a vacuum processing system shall be created in such a way that it is able to handle also large... Read More
Inventors: Galdos, Aitor; Wagner, Rudolf; Bruderer, Markus;, Assignee: Balzers Aktiengesellschaft (Furstentum, LI) |
Multiple interface door for wafer storage and handling container
OF THE INVENTION The present invention is an improved design for providing multiple access ports into a sealed container or "pod" for handling (i.e., transporting, storing, etc.) contamination sensit... Read More
Inventors: McKenna, Douglas B.; Briner, Donald R.; Laramore, Christopher D.;, Assignee: Bye/Oasis (Austin, TX) |
Dual cassette load lock
In accordance with the preferred embodiment of the present invention, a workpiece loading interface is presented for inclusion within a workpiece processing system. The workpiece loading interface inc... Read More
Inventors: Toshima, Masato M.; Salzman, Phil M.; Murdoch, Steven C.; Wang, Cheng; Stenholm, Mark A.; Howard, James; Hall, Leonard; Cheng, David;, Assignee: Applied Materials, Inc. (Santa Clara, CA) |
Substrate housing and docking system
Accordingly, the present invention provides a modular, transportable housing for storing articles such as substrates, including semiconductor wafers, masks and flat panel displays, for example, and fo... Read More
Inventors: Babbs, Daniel A.; Shultz, Richard E.;, Assignee: Progressive System Technologies, Inc. (Austin, TX) |
Wafer position error detection and correction system
OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention detect wafer positions as wafers are transported within a semiconductor processing equipment and compensate for wafer misal... Read More
Inventors: Freerks, Frederik W.; Berken, Lloyd M.; Crithfield, M. Uenia; Schott, David; Rice, Michael; Holtzman, Michael; Reams, William; Giljum, Richard; Reinke, Lance; Booth, John S.;, Assignee: Applied Materials, Inc. (Santa Clara, CA) |
Substrate cassette and side rail therefor
The present invention has been made in view of the foregoing disadvantages of the prior art. Accordingly, it is an object of the present invention to provide a side rail for a substrate cassette which... Read More
Inventors: Ishikawa, Toshio;, Assignee: |
Method of processing a semiconductor device
Alignment of a substrate handier to an electrostatic chuck is accomplished using an alignment tool and an alignment pin to align a reference point on the electrostatic chuck directly to a reference p... Read More
Inventors: Powers, George S.;, Assignee: Motorola, Inc. (Schaumburg, IL) |
Semiconductor processing chamber calibration tool
An apparatus and method for aligning the components of a semiconductor processing system is disclosed. A calibration tool positioned on the main body of the processing chamber is used to align the coo... Read More
Inventors: Li, Shih-Hung; Green, Timothy;, Assignee: Applied Materials, Inc. (Santa Clara, CA) |
Robot having a centering and flat finding means
One aspect of the present invention provides a wafer handling robot which does not require a second mechanism for performing the task of pre-alignment. Preferred robots according to this aspect of the... Read More
Inventors: Hillman, Gary;, Assignee: Creative Design Corporation (Montville, NJ) |
Wafer out-of-pocket detector and susceptor leveling tool
An apparatus and method for monitoring the level of a semiconductor processing chamber susceptor and the inclination of a wafer residing within a pocket of the susceptor is disclosed. The apparatus of... Read More
Inventors: Li, Shih-Hung; Vass, Curtis;, Assignee: Applied Materials, Inc. (Santa Clara, CA) |
Method for in-cassette wafer center determination
It is therefore an advantage of the present invention to provide an improved method and apparatus for reading an OCR or similar indicial mark. It is a further advantage of the present invention to pro... Read More
Inventors: Bonora, Anthony C.; Fosnight, William J.; Swamy, Krishna D.; Davis, Mark R.; Cookson, Mike;, Assignee: Asyst Technologies, Inc. (Fremont, CA) |
Semiconductor alignment tool
OF THE DRAWINGS The invention is a semiconductor alignment tool having a housing that has a number of registration pins for mating with a standard semiconductor cassette. A plurality of x-y axis sens... Read More
Inventors: Beckhart, Gordon Haggott; Conarro, Patrick Rooney; Harrell, Kevin James; Krause, Michael Charles; Farivar-Sadri, Kamran Michael;, Assignee: MicroTool, Inc. (Colorado Springs, CO) |
Device for testing wafer-transporting robot
What is claimed is: 1. An inspection apparatus for inspecting a substrate transfer robot having a substantially horizontally movable blade on which a substrate is mounted, said inspection apparatus co... Read More
Inventors: Mori, Kunihiko; Ishikura, Taizo;, Assignee: Applied Materials, Inc. (Santa Clara, CA) |
Indexer for magazine shelves of a magazine and wafer-shaped objects contained therein
Therefore, the problem arises of ensuring accurate access in any desired and predeterminable magazine plane, also for magazines which are provided with an opening on only one removing and charging sid... Read More
Inventors: Schlehahn, Volker; Schultz, Klaus;, Assignee: Jenoptik Aktiengesellschaft (Jena, DE) |
Apparatus for alignment of automated workpiece handling systems
S The present inventions are, in one aspect, directed to an alignment tool, method and system for aligning a robot blade in a workpiece handling system, in which the tool comprises a frame or fixture ... Read More
Inventors: Schauer, Ronald Vern; Lappen, Alan Rick;, Assignee: Applied Materials, Inc (Santa Clara, CA) |
Method and apparatus for determining urea concentration
After intense investigation, the inventors have found that the above-identified problems may be solved by heating an aqueous solution containing urea under increased pressure, thereby hydrolyzing urea... Read More
Inventors: Tajiri, Yoshihiro; Hayabuchi, Takuya; Teramoto, Naohiro; Kojima, Yasuhiko; Sakata, Eiji; Morikawa, Haruyuki;, Assignee: Toyo Engineering Corporation (Tokyo, JP) |
Mass spectra interpretation system including spectra extraction
OF THE INVENTION Introduction In order to best convey the advantages of the present invention, it is necessary to present a brief overview of mass spectrometry, and a typical spectral analysis techni... Read More
Inventors: Gray, Zachary A.; Abel, Roger H.;, Assignee: Hewlett Packard Company (Palo Alto, CA) |
Real-time on-line analysis of organic and non-organic compounds for food, fertilizers, and pharmaceutical products
It is therefore an object of this invention to provide an apparatus and method for infrared spectroscopy of organic compounds which can be performed sufficiently rapidly to be used on a mass productio... Read More
Inventors: Soloman, Sabrie;, Assignee: |
Method for library searches and extraction of structural information from daughter ion spectra in ion trap mass spectrometry
What is claimed is: 1. Method for the generation of an ion spectrum of a substance obtained by an ion trap mass spectrometer, the spectrum being usable for substance identification during searching of... Read More
Inventors: Franzen, Jochen;, Assignee: Bruker Daltonik GmbH (Bremen, DE) |
Mobile robot navigating method
Accordingly, it is an object of the present invention to provide a mobile robot navigating method capable of quickly and accurately controlling the mobile robot for steady running to a desired posture... Read More
Inventors: Kanayama, Yutaka;, Assignee: Shinko Electric Co., Ltd. (Tokyo, JP); Sogo Securities Co., Ltd. (Tokyo, JP) |
Robotic drug dispensing system
What is claimed is: 1. An automated robotic dispensing system for introducing a unit drug dose from a vial having a top diaphragm pierceable by a needle into a container of solute therefor, comprising... Read More
Inventors: Zezulka, Bohuslav J.; Voss, Henry H.; Fincati, Anne M.;, Assignee: Alberta Research Council (Alberta, CA) |
Electrical cable interface for electronic camera
What is claimed is: 1. A video camera system comprising: an electronic camera head comprising: a solid-state video imager for providing a video signal waveform comprising analog video signals, and tim... Read More
Inventors: Baxter, Larry K.; Coffey, John J.;, Assignee: PictureTel Corporation (Peabody, MA) |
Head-mounted projection display system featuring beam splitter and method of making same
The present invention provides a head-mounted projection display system featuring a beam splitter to attain co-location of the display and resolve the problem of high cost and the narrow field of view... Read More
Inventors: Fisher, Ralph W.;, Assignee: Evans & Sutherland Computer Corp. (Salt Lake City, UT) |
Control Computers 
