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| Method for balancing power sources and structure therefor |
| OF THE DRAWINGS Generally, the present invention provides a circuit and a method for electrically ... |
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| Portable electric power source with attached battery charger |
| OF SPECIFIC EMBODIMENTS The technical terms used in this specification have the following ... |
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| Connecting multiple batteries to battery powered devices |
| What is claimed is: 1. A circuit for connection between multiple batteries and a battery using ... |
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| Circuit for generating three-phase PWM signal |
| In view of the above-mentioned problems in the prior art, it is an object of the present invention ... |
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| Voltage regulator with non-linear excitation control |
| OF THE INVENTION In FIG. 1, an alternator 10 is coupled to charge a battery 12. The alternator, as ... |
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| Switching regulator |
| OF THE DRAWINGS FIG. 1 is a circuit view showing an embodiment of a switching regulator according ... |
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| Real time charging control of a fast battery charger |
| It is an object of the present invention to provide methods and circuits to terminate charging of a ... |
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| Life protector enclosure for mines |
| I claim: 1. An enclosure for use in underground mines to provide protection to miners in advance of,... |
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| Battery assembly |
| OF THE PREFERRED EMBODIMENT Referring to FIG. 1, the invention is incorporated in a remote ... |
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Substrate transfer system
| Details |
Inventors: Ukaji, Takao; Yamane, Yukio;
Assignee: Canon Kabushiki Kaisha (Tokyo, JP)
Primary Examiner: Ro; Bentsu
Assistant Examiner:
Attorney, Agent or Firm: Fitzpatrick, Cella, Harper & Scinto
A substrate transfer system includes a temporary support for temporarily supporting a substrate, a chuck for holding the substrate by attraction, a stage for supporting the chuck movably in a predetermined direction intersecting a substrate supporting face of the temporary support, a driving system for moving the stage in the predetermined direction, a measuring system for measuring a position of the stage with respect to the predetermined direction, a position servo system for controlling the driving system on the basis of the measurement by the measuring system to thereby servo control the position of the stage with respect to the predetermined direction, and a control system adapted to release the substrate attracting and holding operation of the chuck on the basis of a value corresponding to an amount of operation applied from the position servo system to the driving system. This substrate transfer system assures transfer of a substrate with small stress to the substrate, as well as high speed and high precision transfer of the substrate with a simplified .theta. alignment mechanism. |
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DETAILED DESCRIPTION It is an object of the present invention to provide a high speed and high precision substrate transfer system by which the transfer of a substrate, such as a wafer, is assured with a small stress to the substrate due to the alignment mechanism having a simple structure.
It is another object of the present invention to provide a device manufacturing method by which high precision and reduced cost device manufacture is assured.
In accordance with an aspect of the present invention, there is provided a substrate transfer system, comprising: a temporary support for temporarily supporting a substrate; a chuck for holding the substrate by attraction; a stage for supporting the chuck movably in a predetermined direction intersecting a substrate supporting face of the temporary support; driving means for moving the stage in the predetermined direction; measuring means for measuring a position of the stage with respect to the predetermined direction; position servo means for controlling the driving means on the basis of the measurement by the measuring means to thereby servo control the position of the stage with respect to the predetermined direction; and control means adapted to release the substrate attracting and holding operation of the chuck on the basis of a value corresponding to an amount of operation applied from the position servo means to the driving means.
The driving means may comprise at least one linear motor, and the amount of operation may be determined by a motor coil real current to the driving means.
The control means may be adapted to detect an over-current of the motor coil real current, with respect to a predetermined value.
The system may further comprise limiting means for limiting a current to the motor coil of the driving means.
Also, the system may further comprise processing means for processing the substrate held by the chuck.
The processing means may comprise means for projecting light to the substrate.
The substrate may comprise a semiconductor substrate
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Electrical and Wave 
