Resonant element

DETAILED DESCRIPTION OF EMBODIMENTS OF THE INVENTION Hereinbelow, the embodiments in accordance with the present invention will be explained based on the drawings.
In the descriptions of these embodiments, the same components as the above-described previous resonant element are identified by the same reference numerals and a repetition of detailed descriptions thereof are omitted.
FIGS.
1A and 1B show a first embodiment of a resonant element 16 in accordance with the present invention.
As in the case of the above-described previous resonant element 16, the first embodiment of the resonant element 16 is a microelement produced utilizing a silicon micromachining technique or the like, and is used, for example, in an angular velocity sensor or the like.
As is the case with the previous resonant element 16 in FIGS.
7A and 7B, the first embodiment of the resonant element 16 comprises a planar vibrating body 10 and an exciter 4 utilizing the electrostatic forces of comb electrodes 6A and 6B.
It has been found that the above-described deflections of the planar vibrating body 10 in the detection direction are principally attributable to the tilt of the planar vibrating body 10 with respect to the substrate plane direction of the fixed substrate 1.
In this first embodiment, therefore, a vibrating body tilt correcting means have been provided specifically for adjusting the resonance frequency of the planar vibrating body 10 and correcting the tilt of the planar vibrating body 10 with respect to the substrate plane direction of the fixed substrate 1.
More specifically, in this first embodiment, as shown in FIG.
1B, two conductive layers 23 and 24 are provided at both edge areas of the planar vibrating body 10 with a gap in the X-direction therebetween, on the plane of the substrate 1 opposed to the plane of the planar vibrating body 10 with a gap interposed in the Y-direction, and these conductive layers 23 and 24 are used as vibrating body tilt correcting means for adjusting the resonance frequency of the planar vibrating body 10 by providing electrostatic attractive forces 21 and 22 to the planar vibrating body 10, and correcting the tilt of the planar vibrating body 10 with respect to the substrate plane direction of the fixed substrate 1