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 Testing apparatus embedded in scribe line and a method thereof

Details
Inventors: Bu, Lin-Kai; Hung, Kun-Cheng;
Assignee: Himax Technologies, Inc. (Tainan, TW)
Primary Examiner: Zarneke; David A.
Assistant Examiner: Nguyen; Tung X.
Attorney, Agent or Firm: Rabin & Berdo, P.C.

A testing method and a testing a voltages apparatus embedded in the scribe line on a wafer are disclosed, for testing the to be measured from a die on a wafer. The testing apparatus includes a multiplexer and a comparator. The multiplexer receives the voltages to be measured and outputs a multiplexing or selected voltage according to a selection signal. The comparator receives a reference voltage and the multiplexing voltage and then outputs a digital result by comparing the reference voltage, and the multiplexing voltage. The digital result can be applied to a digital testing machine, such that testing speed is increased and testing cost is decreased. Moreover, the testing apparatus embedded in the scribe lines has the capability to compensate for the comparator's offset, and accordingly, the testing reliability is also improved.

DETAILED DESCRIPTION The object of the present invention therefore is to provide a testing apparatus embedded in a scribe line and a testing method thereof, which can increase the testing speed and decrease the testing cost.
The testing apparatus is used to check the level of precision of (n-1) voltages to be measured and comprises a multiplexer and a comparator.
The multiplexer comprises n inputs for receiving the (n-1) voltages to be measured or a calibration voltage and comprises one output for outputting a multiplexing voltage according to a selection signal, wherein the multiplexing voltage is one of the (n-1) voltages to be measured and the calibration voltage.
The comparator receives a reference voltage and the multiplexing voltage and then outputs a digital result by comparing the reference voltage and the multiplexing voltage.
The testing method applied in the testing apparatus is also disclosed in the present invention.
Firstly, the comparators are grouped into m types, wherein the different types correspond to the different offset voltages of the comparators.
Then, the voltages to be measured and a comparison voltage are applied to comparators of the kth type, wherein the comparison voltage is the reference voltage plus the offset voltage.
Finally, precision levels of the voltages to be measured are checked according to the digital signals outputted from the comparators.



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