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| Coated cemented carbide product |
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Plasma reactor and method therefor
| Details |
Inventors: Engle, Frank W.;
Assignee:
Primary Examiner: Demers; Arthur P.
Assistant Examiner:
Attorney, Agent or Firm: Berman, Aisenberg & Platt
A plasma reactor includes a plurality of series of parallel disposed cylindrical electrodes carried in a common vacuum vessel chamber. The series of electrodes are adapted to provide alternate polarities on each side of a plurality of workpieces, such as printed circuit boards, enclosed in the reactor for treatment. Supporting brackets are provided for positioning the workpieces, parallel to and between planes formed by series of electrodes of alternate polarities. The supporting brackets are electrically isolated from the electrodes. |
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DETAILED DESCRIPTION OF THE INVENTION Referring now to the drawings, wherein like reference numerals represent identical or corresponding parts throughout the several views, and more particularly to FIGS.
1, 2 and 3 thereof, the plasma reactor of the present invention is indicated generally by reference numeral 10.
Plasma reactor 10 includes a vacuum vessel 12 having a generally cylindrically shaped section 14 with a parabolically shaped door 16 hingedly mounted thereto at brackets 18 by means of nuts and bolts 20 and 22, respectively.
The vacuum vessel is supported on a work surface by legs 15 which are fixed to section 14.
A chamber 24 is defined within vacuum vessel 12.
Typically, vacuum vessel 12 is constructed of internally welded aluminum, and door 16 and cylindrical section 14 sealingly mate at flange members 14a and 16a, respectively, so that when required an evacuated condition is maintained within the chamber 24.
Door 16 is provided with a viewing window 26 and further defines a parabolic surface 28 within the chamber 24.
In utilizing the present invention for production type operations, the vacuum vessel 12 may be, for example, 38 inches in diameter and 48 inches deep.
A box-like cage frame 30, constructed from angle rails, is carried by vacuum vessel 12 along support members 32 which extend longitudinally through cylindrical section 14 and are welded thereto.
Support members 32 are themselves formed of angle rails.
Teflon pads, not shown, are positioned between support members 32 and cage frame 30 to electrically isolate cage frame 30 from vacuum vessel 12.
Secured to cage frame 30 are series of parallel, vertically disposed, alternating electrodes 34 and 35, including end electrodes 34a and 35a.
Each electrode is cylindrical in structure.
The electrodes are preferably approximately one inch in diameter, and spaced three inches apart, though other arrangements are possible.
A further feature of the invention is the provision of slightly different diameters of electrodes 34 and 35
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