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 Ultrathin laminated oxide coatings and methods

Details
Inventors: Sarin, Vinod K.; Hintermann, Hans E.; Gindraux, Gilbert;
Assignee: GTE Laboratories (Waltham, MA)
Primary Examiner: Swisher; Nancy A. B.
Assistant Examiner:
Attorney, Agent or Firm: Craig; Frances P.

A wear resistant article, such as a cutting tool. A hard ceramic or cemented carbide substrate is coated with a laminated oxide coating about 0.3-20 microns thick, having at least three ultrathin layers. Each layer is an oxide layer about 0.1-3 microns thick, predominantly of a different material than adjacent layers. The oxide or oxides of adjacent layers may be dispersed as discrete particles within one or more of the layers. A process for producing the article is also disclosed.

DETAILED DESCRIPTION The invention described herein and recited in the appended claims provides an article and a process in which a wear resistant laminated oxide coating of ultrathin layers of controlled composition and distribution is deposited on a hard ceramic or cemented carbide substrate, the article showing improved abrasion resistance under extreme conditions of use.
A wear resistant article according to the invention comprises a hard ceramic or cemented carbide substrate body having a fully dense, adherent, wear resistant, laminated ceramic coating about 0.
3-20 microns thick deposited on the substrate.
The coating has at least three superimposed oxide layers, each about 0.
1-3 microns thick, of materials independently selected from the oxides of aluminum, zirconium, and yttrium.
Each layer is predominantly of a different material than the layers adjacent thereto.
In the preferred article according to the invention, at least one intermediate layer is deposited between the substrate body and the laminated ceramic layer.
The intermediate layer is about 0.
5-10 microns thick and is of one or more materials selected from the carbides, nitrides, and carbonitrides of Ti, Zr, Hf, Va, Nb, Ta, Cr, Mo, W, Si, and B.
In the most preferred article according to the invention, at least one of the oxide layers is about 0.
1-0.
5 microns thick.
A process for depositing a wear resistant composite ceramic coating on a cemented carbide substrate involves passing over the substrate a first gaseous mixture of a first metal halide vapor selected from the halides of aluminum, yttrium and zirconium, with other reactant gases, and optionally a carrier gas.
The reaction temperature is about 900.
degree.
-1250.
degree.
C.
for the cemented carbide substrate, or about 900.
degree.
-1500.
degree.
C.
for the hard ceramic substrate; the pressure between about 1 torr and about ambient pressure.
The other reactant gases, the partial pressure ratios, the flow rates, and the deposition time are selected to deposit on the substrate a coating having at least two layers of a first-phase material selected from the oxides of aluminum, zirconium, and yttrium



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