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Mthod for the surface treatment of semiconductors by particle bombardment |
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Planar P-I-N photodetectors |
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Image recording device |
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Stratification mass for the production of top surfacing layers |
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Adapter element |
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Combustion flame method for forming diamond films
| Details |
Inventors: Murayam, Motohide; Kojima, Shinji; Ohsawa, Katsuyuki; Noda, Shoji; Uchida, Kiyoshi;
Assignee: Kabushiki Kaisha Toyota Chuo Kenkyusho (Aichi, JP)
Primary Examiner: Lusigan; Michael
Assistant Examiner: King; Roy V.
Attorney, Agent or Firm: Jacobson, Price, Holman & Stern
When a mixture of gases containing carbon is burned to form a film of diamond on a surface of a substrate held at an appropriate temperature, it is so burned as to form a substantially flat region of incomplete combustion lying in parallel to the substrate surface and contacting it, while the region is surrounded by an air-shielding gas stream or formed under a reduced pressure. |
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DETAILED DESCRIPTION Under these circumstances, and in view of the fact that a method using a flame of combustion is easier to carry out than any other method based on CVD, and has a higher film-forming speed, it is an object of this invention to provide an improved method which can form a homogeneous film of diamond. It is another object of this invention to provide an apparatus for carrying out the method of this invention. The method of this invention comprises burning a mixture of materials containing carbon so as to form a region of incomplete combustion, placing a substrate in the region, and maintaining the substrate at an appropriate temperature to form a film of diamond on the substrate, characterized in that the region of incomplete combustion is substantially in the shape of a flat shape and is surrounded by an air-shielding gas stream. The apparatus of this invention comprises a main nozzle for injecting a main stream consisting of a gaseous mixture of materials containing carbon, an auxiliary nozzle for injecting an air-shielding gas stream surrounding the main stream, and a holder for holding a substrate opposite the main nozzle and maintaining the substrate at an appropriate temperature to form a film of diamond. The gaseous mixture of materials is burned so as to form (between the substrate and the main nozzle) a region of incomplete combustion shaped substantially in the form of a flat shape and surrounded by the air-shielding gas stream, whereby a film of diamond is formed on the surface of the substrate which is exposed to the region of incomplete combustion. The most salient feature of the method according to this invention resides in the formation of a substantially flat inner flame facing the substrate to thereby realize a field in which active seeds for diamond are formed in a uniform density. If a mixture of acetylene and oxygen is, for example, used as the gaseous mixture of materials, therefore, hydrogen is added to the mixture to lower its rate of combustion, and the inner flame is shielded from the surrounding air so as to rise from the edge of a burner
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