Self-contained hot-hollow cathode gun source assembly

DETAILED DESCRIPTION It is an object of this invention to provide a hot-hollow cathode gun assembly which may be moved within a vacuum chamber.
It is another object of this invention to provide a self-contained hot-hollow cathode gun assembly which can be placed at any position within any vacuum chamber.
Additional objects, advantages and novel features of the invention will become apparent to those skilled in the art upon examination of the following description, or may be learned by practice of the invention.
The objects and advantages of the invention may be realized and attained by means of the instrumentalities and combinations particularly pointed out in the appended claims.
To achieve the foregoing and other objects, and in accordance with the purpose of the present invention, as embodied and broadly described herein, the hot-hollow cathode gun source assembly of this invention may comprise a crucible block having a crucible on an upper surface and a hole near a front portion.
First and second pole plates are affixed to each side of the crucible block, each plate having an upper edge adjacent to the upper side of the block and a lower edge extending below the lower side of the block.
A hot-hollow cathode gun having an output end for releasing an ion/electron beam and an opposed input end for receiving gas and electricity is mounted underneath the lower side of the block with the output end adjacent the hole.
A deflection magnet is connected between the pole plates to deflect the output beam of the gun through the hole and into the crucible.