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Curved surface designing method |
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Digital image processing system and method |
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Apparatus and method for inspection of high component density printed circuit board |
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Double-accumulator implementation of the convolution function |
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Efficient image registration
| Details |
Inventors: Michael, David;
Assignee: Cognex Corporation (Natick, MA)
Primary Examiner: Britton; Howard W.
Assistant Examiner:
Attorney, Agent or Firm: Weinzimmer; Russ
A method and apparatus for efficient registration of a pair of digitized images is provided that obtains a registration metric value based upon a Sum of Absolute Differences registration metric computation for each of a plurality of neighboring-pixel relative displacements, and, for example, iteratively selects a new initial relative displacement from among the plurality of neighboring-pixel relative displacements such that each succeeding new initial relative displacement is associated with a smaller registration metric value, until an initial relative displacement that is associated with a minimum registration metric value is reached. In general, the relative displacement that is associated with the minimum registration metric value is located using a two-dimensional numerical optimization analysis. The invention is especially useful for flaw and defect analysis, such as Golden Template Analysis, third optical inspection, as well as for pair-wise comparison of die images on a semiconductor wafer. |
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DETAILED DESCRIPTION An efficient registration method and apparatus provides substantial registration of all of the features common to a pair of images to be registered, even when one of the images to be registered is flawed. The invention features the use of a registration metric based on minimization of the sum of the absolute value of the differences between a first image and a second image to be registered with respect to the first image. Also employed is an efficient optimization technique, such as a version of gradient descent, wherein a local minimum in a registration metric space is found to the nearest pixel using less computational resources than needed to compute the entire registration metric space. In a preferred embodiment, registration to sub-pixel accuracy can be obtained using a sub-pixel interpolation technique. The invention is well-suited for use in flaw and defect detection applications, such as Golden Template Comparisons, pre- and post-process optical inspection, and inspection of arrays of repeated geometrical designs, wherein after registration is performed, a difference image is derived by computing the difference between each pair of corresponding pixels of the registered image pair.
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