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Image pickup device suitable for dimensional measurement image pickup equipment including a vernier pixel array
| Details |
Inventors: Fukatsu, Yasushi;
Assignee: Kabushiki Kaisha Toshiba (Kawasaki, JP)
Primary Examiner: Nelms; David C.
Assistant Examiner:
Attorney, Agent or Firm: Foley & Lardner
An image pickup device for dimensional measurement comprises a first pixel train serving as a main scale, comprised of pixels arranged at a first pitch (Pm); and a second pixel train serving as a vernier, comprised of pixels arranged at a second pitch (Ps) set to a length different from the first pitch (Pm), and disposed in parallel to the first pixel train. The second pixel train may employ an arrangement comprising N pixel trains, in which adjacent pixel trains are positionally shifted in succession by the second pitch (Ps). In this case, the second pitch (Ps) has the relationship of Pm/N (N is an integer equal to 3 or more) with respect to the first pitch (Pm). |
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DETAILED DESCRIPTION With the above-mentioned circumstances in view, an object of this invention is to provide an image pickup device capable of measuring the dimension of an object to be measured having a dimension finer or smaller than the pitch of the pixel without lowering the S/N.
To achieve the above mentioned object, an image pickup device according to this invention comprises a first pixel train serving as a main scale comprised of pixels arranged at a pitch Pm, and at least one second pixel train serving as a vernier comprised of pixels arranged at a pitch Ps different from the pitch Pm, and disposed in parallel to the first pixel train.
The image pickup device of the invention may include at least two second pixel trains wherein respective pixels are arranged in such a manner that they are staggered each other.
Preferably, the image pickup device of the invention may include N second pixel trains each comprised of pixels arranged at a pitch Ps of (N-1) Pm/N (N is an integer equal to 3 or more) wherein respective pixel trains are arranged in such a manner that they are staggered by Pm/N in succession in one direction.
The image pickup device of the invention may further include a pixel train serving as a main scale comprised of pixels staggered at a pitch Pm, and disposed in parallel to the first pixel train.
Furthermore, in the case where one group of pixel trains is constituted by the first and second pixel trains, there may include a similar pixel train group in a direction perpendicular to the above-mentioned pixel train group.
In the case where only the first pixel train as the main scale is provided, a boundary line formed on the pixels when an image of an object to be measured is projected thereon is only passed on one pixel.
For this reason, it is impossible to provide a measurement accuracy higher than a value corresponding to the length of the pixel pitch Pm.
However, in the case where the image pickup device includes the second pixel train as a vernier, the above-mentioned boundary line is permitted to be passed on different pixels shifted at each start positions
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Image Analysis 
