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Interpolation-device-process-and-recording-medium-on-which-interpolation-processing-program-is-recorded

Bean scanning and method of use for ion implantation

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Interpolation device, process and recording medium on which interpolation processing program is recorded

Details

Inventors: Utagawa, Ken;
Assignee: Nikon Corporation (Tokyo, JP)
Primary Examiner: Garber; Wendy R.
Assistant Examiner: Villecco; John M.
Attorney, Agent or Firm: Oliff & Berridge, PLC

An interpolation device performs interpolation of an image in which grid points that output a predetermined color and empty grid points that do not output the predetermined color are arrayed in a checkered configuration. A recording medium stores an image interpolation processing program. A first similarity calculator calculates a first vertical direction similarity and a first horizontal direction similarity. A second similarity calculator calculates a second vertical direction similarity and a second horizontal direction similarity. A similarity calculator determines the similarity in the vertical direction of an empty grid point based on the first vertical similarity and the second horizontal similarity and determines the similarity in the horizontal direction of the empty grid point based on the first horizontal similarity and the second horizontal similarity. An interpolation amount calculator calculates an interpolation amount, by selecting the pixel output of grid point(s) positioned in a direction with a strong similarity, or by weight-adding the pixel outputs of the grid points positioned in the vertical direction and the horizontal direction, according to the similarities that are determined.

DETAILED DESCRIPTION Thus, one object of the invention is to provide an interpolation device and process that estimates the spatial directivity of empty grid points in detail, and accurately obtains the interpolation amount of the empty grid points.
Another object of the invention is to provide a recording medium on which is recorded an interpolation processing program that estimates the spatial directivity of the empty grid points in detail and that accurately obtains the interpolation amount of the empty grid points.
An interpolation device according to one aspect of the invention performs interpolation of an image having grid points that output a predetermined color and at least one empty grid point that does not output the predetermined color, the grid points being oriented in a checkered configuration, and obtains an interpolation amount that becomes a pixel output of the empty grid point.
A correlation amount calculator determines a correlation between individual pixel outputs of at least two grid points adjacent to the empty grid point and pixel outputs of each one of grid points oriented in shifted positions in the four directions of upper, lower, right, and left directions, respectively, with respect to the at least two grid points, and calculates a correlation amount showing the correlation strength in each direction.
A similar direction detector identifies a direction having a strong correlation amount based upon the correlation amount for each direction calculated by the correlation amount calculator.
An interpolation amount calculator determines an interpolation amount of the empty grid point based upon a pixel output of at least one grid point in a direction where correlation discerned by the similar direction detector is strong.
An interpolation device according to another aspect of the invention performs interpolation of an image having grid points that output a predetermined color and at least one empty grid point that does not output the predetermined color, the grid points being oriented in a checkered configuration, and obtains an interpolation amount that becomes a pixel output of the empty grid point

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