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 Semiconductor component comprising bump-like, metallic lead contacts and multilayer wiring

Details
Inventors: Pammer, Erich;
Assignee: Siemens Aktiengesellschaft (Berlin and Munich, DE)
Primary Examiner: James; Andrew J.
Assistant Examiner: Lamont; John
Attorney, Agent or Firm: Hill, Van Santen, Steadman & Simpson

A semiconductor component having bump-like, metallic lead contacts and multilayer wiring wherein individual tracks of each and every electrical signal or potential to be wired in multilayer wiring technology are electrically connected to the respective lead contact in the region thereof and to one another, but are separated from one another in the remaining regions of the semiconductor component by insulating layers. The various insulating layers terminate at different distances from the lead contacts in such fashion that their ends, depending upon the embodiment, form a funnel that tapers either down or up. The difference of the respective distance of the ends of two neighboring insulating layers from the corresponding lead contacts amounts to at least twice the thickness of one of the two layers. Given different layer thicknesses, a dimension of the thicker layer is used. An insulating layer may be at most 2 .mu.m thick, and preferably 1 .mu.m. Edge interruptions at the tracks and sputtering gaps and voids at the lead contacts which lead to contact causticization, corrosion, and subsequent electrical failure are thus avoided.

DETAILED DESCRIPTION An object of the present invention is to alleviate this situation and to create a semiconductor component with bump-like metallic lead contacts and multilayer wiring wherein these interruptions at edges as well as sputtering gaps or voids cannot appear, and consequently wherein the described contact causticizations and corrosion are also reliably avoided.
Given a semiconductor component of the type initially cited, this object is achieved by means of providing individual insulating layers at a given contact location which terminate in a horizontal direction at different distances from an imaginary, vertical projection line of an edge of an area of the lead contact defined by a horizontal plane of section at a height at which the lead contact has its greatest horizontal expanse on a final passivation layer lying therebelow.
By terminating the insulating layers at different distances, the steps formed have a minimized height as compared to the prior art.
When etching the insulating layers, one succeeds in creating steps with a height sufficient to prevent the track interruptions as well as the occurrence of sputtering gaps and voids when vapor-depositing the lead contacts.



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