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Field emission electron gun
| Details |
Inventors: Sakitani, Yoshio;
Assignee: Hitachi, Ltd. (JA)
Primary Examiner: Rolinec; Rudolph V.
Assistant Examiner: Hostetter; Darwin R.
Attorney, Agent or Firm: Craig & Antonelli
A field emission electron gun capable of generating a highly stabilized electron beam, comprises a cathode tip for emitting electrons, an anode for attracting and accelerating the electrons, and means for heating the anode. A surface layer of the anode, which is to be bombarded by the electrons, consists essentially of getter material such as Zr-Al alloy. The anode heating means serves for heating the surface layer, so as to remove the absorbed gas molecules and to elevate the gettering effect of the getter material, whereby the absorbed gas molecules in the anode are hardly released therefrom, even if the anode surface is bombarded by the electrons. Therefore, the number of ions impinging on the cathode tip is remarkably reduced, and a stable electron beam can be obtained from the cathode tip. |
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DETAILED DESCRIPTION It is therefore an object of the invention to provide a field emission electron gun capable of generating a stable electron beam for a long period of time. A further object of this invention is to provide a field emission electron gun having a long life without any deformation and destruction of the cathode tip. In order to accomplish these objects, the field emission electron gun according to the invention is characterized in that at least one part of the anode surface directly facing to the cathode tip (more particularly, at least one part of the anode surface which is to be bombarded by the electrons emitted from the cathode tip) is made of a getter material including at least one metal element selected from the group consisting of titanium (ti), zirconium (Zr), thorium (Th) and barium (Ba). Also, anode heating means is provided for heating the anode surface so as to elevate the gettering effect of the getter material. In the foregoing arrangement, the anode surface consisting of the getter material, which has been previously outgassed and activated by the heating means, strongly absorbs the residual gas in the vacuum. The absorbed gas molecules in the activated getter material are hardly released from the anode surface when the anode surface is bombarded by electrons emitted from the cathode tip. Therefore, the number of ions emanated from the anode surface is remarkably reduced. Thus, ion impingement on the cathode tip is prevented, and a stable electron beam is obtained. Other objects and features of the invention will be apparent from the following detailed description when read in conjunction with the accompanying drawings.
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