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Home LCD Method-for-manufacturing-a-liquid-crystal-display-device-with-thin-film-transistors

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Details
Inventors: Oritsuki, Ryouji; Wakui, Masateru; Suzuki, Hirofumi;
Assignee: Hitachi, Ltd. (Tokyo, JP)
Primary Examiner: Hearn; Brian E.
Assistant Examiner: Nguyen; Tuan
Attorney, Agent or Firm: Antonelli, Terry, Stout & Kraus

There is disclosed a liquid crystal color display of the active matrix type. A method of fabricating the display is initiated by depositing a transparent conductive material of indium tin oxide (ITO) as a thin layer onto a glass plate. Then chromium is deposited as an opaque film onto the ITO layer. The two layers are selectively removed, using a first mask pattern. A layer of an insulator consisting of Si.sub.3 N.sub.4 is deposited on the laminate within a reducing atmosphere of plasma. An I-type amorphous silicon layer is formed on the insulator layer. A highly doped N-type amorphous silicon layer is then formed. The N-type silicon layer, the I-type silicon layer, and the silicon nitride layer are selectively removed. An aluminum layer is formed on the laminate and then selectively etched away. Finally, the chromium layer is selectively etched away to form gates, gate leads, pixel electrodes, sources, drains and drain leads.

DETAILED DESCRIPTION It is an object of the invention to provide a liquid crystal display which can be manufactured economically.
It is another object of the invention to provide a liquid crystal display which exhibits high brightness.
It is a further object of the invention to provide a long-lived liquid crystal display.
It is a still other object of the invention to provide a liquid crystal display having thin-film transistors whose cutoff characteristics are less deteriorated when light falls upon the transistors.
It is a yet other object of the invention to provide a liquid crystal display which have thin-film transistors possessing improved cutoff characteristics, and in which DC component applied to the liquid crystal is suppressed.
It is still another object of the invention to provide a method of fabricating a liquid crystal display in such a way that point defects in the character display portion, or defective pixels, are reduced.
It is yet another object of the invention to provide a method of fabricating a liquid crystal display in such a manner that point defects formed in the character display portion are made less conspicuous.
It is an additional object of the invention to provide a method of fabricating a liquid crystal display in such a way that point defects in the character display portion, or defective pixels, are reduced and that nonuniformity of the brightness of darkened portions is reduced.
It is a still additional object of the invention to provide a method of fabricating a liquid crystal display easily in such a manner that nonuniformity of the brightness of darkened portions is reduced.
It is a yet additional object of the invention to provide a method of fabricating a liquid crystal display in which the DC component applied to the liquid crystal of the character display portion is reduced, and in which nonuniformity of the brightness of darkened portions is reduced.
In one embodiment of the invention, two layers, i.
e.
, a transparent conductive layer and an opaque conductive layer, are first patterned to form gates, leads, and pixel electrodes



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