Probe card system and method

DETAILED DESCRIPTION An improved prober to test head interfacing system and method is provided by virtue of the present invention, otherwise referred to herein as an autoloader.
The system provides for easy replacement of the probe card, and for a systematic method and device for probe card data collection.
The autoloader system includes a prober, and a tester having a test head.
A variety of wafer probe cards are mounted in removable cassettes.
The cassettes are easily transported into and out of the prober without undocking the test head.
A non-volatile or battery backed-up memory device is mounted on the probe card or the cassette.
The memory device records various performance and operating data regarding the probe card including, for example, contact failures the location of the probes which failed, touchdowns, date of last repair/alignment, date of manufacture, and the like.
The memory device is removed with and remains attached to the probe card or probe card cassette, even when the probe card is removed from the autoloader system.
The memory device is preferably a serial device, preferably requiring only a single contact for data transmission, thus eliminating the need for a multi-pin connection.
The memory may be polled either by the autoloader system (when inserted in the autoloader system) or in an auxiliary device located, for example, at a probe card maintenance station.
When the data recorded on the probe card memory includes, for example, contact failure locations, it becomes easy to repair an individual probe card after it is removed from service for maintenance.
Accordingly, it becomes possible to maintain a collection of diverse probe card types, while still maintaining performance data on individual cards.
In addition, the invention provides a number of additional features.
For example, the system allows for standardized tester interfaces, provides for probe card protection (in its cassette), and provides for motorized, repeatable probe tip to pad alignment.
At the same time, the cassette system can be retrofitted to existing wafer probe systems or designed into new systems