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Lighting apparatus
| Details |
Inventors: Kurokawa, Shuji; Kobayashi, Kenji;
Assignee: Lintec Corporation (Tokyo, JP)
Primary Examiner: Cariaso; Alan
Assistant Examiner: Sawhney; Hargobind S.
Attorney, Agent or Firm: Blank Rome Comisky & McCauley, LLP
A lighting apparatus 1 has a convex lens 11 arranged so that its optical axis is at an angle .theta. with respect to the normal of an observation portion 3a (e.g., a semiconductor substrate or the like), with a camera 5 arranged in the path of the reflected light rays. When a light-emitting portion 13 is arranged along the optical axis of the lens 11, a bright field illumination takes place. If a knob 29 is turned, the light-emitting portion 13 moves along a ball screw 25, thereby changing the illumination from a bright field illumination to a dark field illumination. When a knob 37 is turned, the light exiting the lens 11 will diverge if the light-emitting portion 13 is moved close to the lens 11, converge if the light-emitting portion 13 is moved far away from the lens 11, and be parallel if the light-emitting portion 13 is positioned at the focal point of the lens 11. By changing the position of the light-emitting portion 13 in this way, it is possible to change the illuminating angle and the illuminating angle distribution, and by adjusting the position of the light-emitting portion 13 in accordance with the optical characteristics of the object 3, it is possible to obtain a high contrast image. It is also possible for these adjustments to be carried out automatically by using an actuator, microcomputer or the like. |
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DETAILED DESCRIPTION In order to overcome the problems of the prior art described above, the present inventor carried out experiments to determine the relationship between the illuminating angle and the image formed.
When the present inventor conducted such research, the positional relationship between a wafer, which comprised the object to be observed, and a camera and camera lens was fixed, with the illuminating angle and parallel characteristics of the illumination light being changed for various cases.
The results of such research are as follows: (1) There was more than one illuminating angle that can be used to make the wafer ID letters clearly visible from the surrounding portions of the wafer.
Indeed, there was a plurality of continuous illuminating angle ranges which can be used.
Further, there was a plurality of illuminating angle ranges which can be used to make any defects or unevenness of the wafer clearly visible.
Moreover, there was also a plurality of illuminating angle ranges which have no effect on the ID letters or the defects and uneven portions of the wafer.
It is possible to consider at least the wafers of the same lot as having roughly common properties, provided that the warping of each wafer is corrected.
(2) Depending on the method of writing in ID letters and the process for forming each type of IC, there were frequent cases in which the illuminating angle ranges (as mentioned in (1) above) and the number of such ranges were different for each lot.
(3) There were lots that did not necessarily require parallel illumination light.
Indeed, there were cases where either converging light or diverging light was preferred.
From the results above, namely from the fact that there exists a plurality of preferred illuminating angle ranges and from the fact that the illumination light need not be parallel, the present inventor illuminated objects at various illuminating angles and at various illuminating angle distributions, and discovered an easy and fast way of carrying out illumination to obtain an image having a high degree of contrast
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