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 Mercury chalcogenide contact for semiconductor devices

Details
Inventors: McCaldin, James O.; Best, John S.;
Assignee: California Institute of Technology (Pasadena, CA)
Primary Examiner: Ozaki; G.
Assistant Examiner:
Attorney, Agent or Firm: Linderberg, Freilich, Hornbaker, Wasserman, Rosen & Fernandez

An improved contact material for use in the fabrication of semiconductor devices is provided. This material comprises one of the mercury chalcogenides. The application of this material to a nondegenerate semiconductor may be made by the process of evaporation. The resulting contact is stable in the atmosphere, and is more electronegative than the best contact material, namely gold, that is now used.

DETAILED DESCRIPTION An object of this invention is to provide a contact material for nondegenerate semiconductors, which has high electronegativity.
Another object of this invention is to provide a contact material for nondegenerate semiconductors which has a high electronegativity, and yet is still easy to fabricate onto the semiconductor.
Still another object of this invention is the provision of a novel and useful semiconductor contact material.
The foregoing and other objects of this invention may be achieved by using one of a group of materials which are designated as mercury chalcogenides, excepting those very sulphur-rich compositions with the cinnabar structure.
These materials may comprise one of the binary compounds HgSe, HgTe, and .
beta.
-HgS or alloys of these binary compounds.
The preferred material is HgSe.
A contact in accordance with this invention, may be grown on the surface of the semiconductor material, by placing the semiconductor material inside a chamber and exposing it to mercury vapor within that chamber while evaporating the selenium or other material to be used.
The novel features of the invention are set forth with particularity in the appended claims.
The invention will best be understood from the following description when read in conjunction with the accompanying drawings.



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