|
|
Sealable transportable container having a particle filtering system
The present invention is a transportable container which provides a clean environment for articles to be processed and which employs an active filtering system in ...
|
|
|
Fuel filler pipe seal
The primary purpose of the present invention is to provide a one-piece fuel filler pipe seal of elastomeric material which includes an integral check valve portion for ...
|
|
|
Method and apparatus for transferring articles between two controlled environments
It is, therefore, an object of the present invention to provide a method and apparatus for transferring articles from a SMIF pod to a processing station without ...
|
|
|
Evacuated wafer container
We claim: 1. A wafer storing and shipping container comprising a readily transportable plastic container free of adjoining apparatus and formed of stiff material and ...
|
|
|
Device for automatic control of a flow limiting valve
What is claimed: 1. Device for controlling a flow limiting valve mounted in a cover of an appliance for cooking under pressure, the appliance further including a ...
|
|
|
Mechanical interface wafer container
A standardized mechanical interface (SMIF) pod for use in conjunction with SMIF systems is disclosed. The pod is utilized for transporting article, such as semiconductor ...
|
|
|
Fill system including a fill valve housing with interchangeable sanitary cover and clean-in-place manifold
A filling system is set forth that assists in overcoming many of the foregoing problems. The filling system comprises a valve housing having a flow channel, an inlet to ...
|
|
|
Wafer holding device in an exposure apparatus
It is accordingly an object of the present invention to provide an exposure wafer holding device, by which the wafer can be cooled without degradation of the pattern ...
|
|
|
Method and apparatus for storing and dispensing a liquid composed of oxygen containing mixture
In accordance with the present invention, a method is provided for storing and dispensing a liquid consisting of an oxygen containing mixture to ensure that the liquid ...
|
|
|
Method and a device for precooling the helium tank of a cryostat
Now, it is the object of the present invention to provide a method and/or a device for precooling the helium tank of a cryostat which avoid the before-mentioned ...
|