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Illuminating system for vacuum ultraviolet microlithography
| Details |
Inventors: Wangler, Johannes;
Assignee: Carl-Zeiss-Stiftung (Heidenheim, DE)
Primary Examiner: Ben; Loha
Assistant Examiner:
Attorney, Agent or Firm: Ottesen; Walter
An illuminating system for the vacuum ultraviolet (VUV) microlithography (at 157 nm) is disclosed and has a VUV light source (1), refractive optical elements of fluoride, at least one microlens array (3, 5) functioning as an element for increasing the light conductance value, and at least one honeycomb condenser (7a, 7b). The honeycomb condenser is preferably configured of crossed cylinder lens arrays. |
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DETAILED DESCRIPTION What is claimed is: 1.
An illuminating system for vacuum ultraviolet microlithography comprising along an optical axis of the system: a vacuum ultraviolet light source; at least one refractive optical element of a fluoride; at least one microlens array defining a light-conductance value increasing unit; and, at least one honeycomb condenser.
2.
The illuminating system of claim 1, wherein said refractive optical elements are of calcium fluoride.
3.
The illuminating system of claim 1, said honeycomb condenser comprising crossed cylinder arrays.
4.
The illuminating system of claim 3, wherein said crossed arrays are configured from rod lenses.
5.
The illuminating system of claim 1, wherein said illuminating system further comprises at least one of the following: a mirror or one or more refractive optical elements made of a second material different from said fluoride.
6.
The illuminating system of claim 1, wherein said one microlens array is a first microlens array; and, wherein said illuminating system further comprises a second microlens array arranged downstream of said first microlens array; and, an objective interposed between said first and second microlens arrays.
7.
The illuminating system of claim 6, wherein said objective is a zoom objective configured to adjust the degree of coherence.
8.
The illuminating system of claim 6, wherein said illuminating system is configured to illuminate a field; and, said second microlens array including a plurality of raster elements approximately geometrically similar to the illuminated field.
9.
The illuminating system of claim 1, further comprising a relay optic and a field lens arranged on said optical axis downstream of said honeycomb condenser.
10.
The illuminating system of claim 1, consisting only of refractive elements, optical aperture plates and optical plane mirrors.
11.
The illuminating system of claim 1, wherein said honeycomb condenser comprises: two plates and each of said plates including two arrays of crossed cylinder lenses made of calcium fluoride and each of said arrays having a number of cylinder lenses in the order of magnitude of 100 to 10,000
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Lighting 
