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Partial coherence varier for microlithographic system |
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Illuminating arrangement including a zoom objective incorporating two axicons |
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Illuminating system for vacuum ultraviolet microlithography |
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Zoom illumination system for use in photolithography |
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Illuminating system of a microlithographic projection exposure arrangement |
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Leak detector
| Details |
Inventors: Gersh, Michael E.; Adler-Golden, Steven M.; Goldstein, Neil M.; Bien, Fritz;
Assignee: Spectral Sciences, Inc. (Burlington, MA)
Primary Examiner: Hannaher; Constantine
Assistant Examiner:
Attorney, Agent or Firm: Iandiorio; Joseph S., Dingman; Brian M.
A leak detector for monitoring, in an area being investigated, the presence of a liquid having a characteristic fluorescence spectrum. The leak detector includes a radiation source, with the radiation provided to the area being investigated. The detector also includes a collector for collecting radiation, in the fluorescence emission band of the liquid being monitored, emitted from the area being investigated. The presence of this liquid is sensed by detection of a threshold level of collected radiation. The size of a stain of the liquid relative to the size of the field of view of the collector is then determined. |
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DETAILED DESCRIPTION What is claimed is: 1. A leak detector for monitoring, in an area being investigated, the presence of a liquid having a characteristic fluorescence spectrum, comprising: a radiation source; means for providing the radiation from said source to said area being investigated; means for collecting radiation, in the fluorescence emission band of said liquid being monitored, emitted from said area being investigated; means, responsive to said means for collecting, for detecting a threshold level of said collected radiation to sense the presence of said liquid; means, responsive to said means for collecting, for determining the size of the stain of said liquid relative to the size of the field of view of said means for collecting radiation; means for determining the distance from said means for collecting radiation to said area being investigated; and means, responsive to said means for determining the size of a stain relative to the field of view and responsive to said means for determining the distance, for resolving the actual size of said stain. 2. The leak detector of claim 1 further including means, responsive to said means for detecting, for indicating the presence of said liquid in said area being investigated when said threshold level is reached. 3. The leak detector of claim 2 in which said threshold level is above the background radiation level. 4. The leak detector of claim 2 in which said means for indicating produces an audio output whose intensity varies as a function of the intensity of said collected radiation. 5. The leak detector of claim 2 in which said means for indicating produces an audio output whose frequency varies as a function of the intensity of said collected radiation. 6. The leak detector of claim 2 in which said means for indicating produces a flashing light whose flashing frequency varies as a function of the intensity of said collected radiation. 7. The leak detector of claim 1 in which said means for determining the size of a stain relative to the field of view includes means for comparing the intensity of said collected radiation to a reference intensity to determine the size of the stain relative to the size of the field of view
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