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Method and a device for precooling the helium tank of a cryostat
Now, it is the object of the present invention to provide a method and/or a device for precooling the helium tank of a cryostat which avoid the before-mentioned ...
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Cooling system for superconducting magnet
What is claimed is: 1. A cooling system for circulating a refrigerant flowing through a heat exchanger which is connected to a cryocooler coldhead, the cooling system ...
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Semiconductor processing apparatus for promoting heat transfer between isolated volumes
In accordance with the present invention, an apparatus and method are disclosed which can be used to provide a seal between two portions of a semiconductor processing ...
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Ion purification for plasma ion implantation
In accordance with the present invention, ions in a plasma which are to be implanted in a target by the plasma source ion implantation process are purified to eliminate ...
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System and method for producing oscillating magnetic fields in working gaps useful for irradiating a surface with atomic and molecular ions
What is claimed is: 1. A magnetic scanning system for rapidly sweeping a high perveance beam of atomic or molecular ions over a selected surface, said beam initially ...
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Low temperature reaction bonding
In the method for enhancing the bond energy of solid-to-solid reaction bonding, the surfaces to be bonded are polished to a roughness in the order of atomic dimensions ...
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Direct gas-phase doping of semiconductor wafers using an organic dopant source of phosphorus
The present invention encompasses using an organic source of a dopant species, including the organic compounds comprising boron, arsenic and phosphorous for thermally ...
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Apparatus for obtaining dose uniformity in plasma doping (PLAD) ion implantation processes
A PLAsma Doping (PLAD) ion implantation apparatus is described for obtaining dose uniformity radially across the surface of an ion implantation target wherein the target ...
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Apparatus for processing glass substrate
It is an object of the present invention to provide a glass substrate processing apparatus which can avoid the occurrence of damage caused by a thermal expansion ...
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Paraffin bath
What is claimed is: 1. A paraffin bath apparatus for melting paraffin comprising: a tub being generally cup shaped and having a bottom wall and an open top; paraffin ...
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