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 Ohmic contact for p-type group II-IV compound semiconductors

Details
Inventors: DePuydt, James M.; Qiu, Jun; Cheng, Hwa; Haase, Michael A.;
Assignee: Minnesota Mining and Manufacturing Company (St. Paul, MN)
Primary Examiner: Hille; Rolf
Assistant Examiner: Ostrowski; David
Attorney, Agent or Firm: Griswold; Gary L., Kirn; Walter N., Sherman; Lorraine R.

A ZnSe semiconductor device includes a ZnSe pn junction having p-type and n-type layers, and an ohmic contact to both layers. The ohmic contact to the p-type layer includes a p-type ZnSe crystalline semiconductor contact layer, and a conductive electrode layer characterized by a Fermi energy. The contact layer is doped with nitrogen shallow acceptors, characterized by a shallow acceptor energy, to a net acceptor concentration of at least 5.times.10.sup.17 cm.sup.-3. The contact layer also includes sufficient deep energy states between the shallow acceptor energy and the electrode layer Fermi energy to enable cascade tunneling by charge carriers.

DETAILED DESCRIPTION The present invention is an improved p-type ohmic contact for Group II-IV semiconductors.
The contact includes a p-type Group II-VI semiconductor device layer and a p-type Group II-VI crystalline semiconductor contact layer on the first side of the device layer.
A conductive electrode layer characterized by a Fermi energy is on the contact layer.
The contact layer is doped, with shallow acceptors having a shallow acceptor energy, to a net acceptor concentration of at least 1.
times.
10.
sup.
-17 cm.
sup.
-3, and includes sufficient deep energy states between the shallow acceptor energy and the electrode layer Fermi energy to enable cascade tunneling by charge carriers.
In a preferred embodiment the semiconductor device layer includes a ZnSe semiconductor layer.
The electrode layer includes a gold layer.
The contact layer is doped with nitrogen to a concentration of 1.
times.
10.
sup.
-19 cm.
sup.
-3.



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