|
|
Rotatable substrate supporting susceptor with temperature sensors
In accordance with the present invention, a new and useful rotatable substrate supporting mechanism is disclosed for use in single substrate chemical vapor deposition ...
|
|
|
Semiconductor wafer temperature measurement system and method
Other objects and advantages will be obvious, and will in part appear hereinafter and will be accomplished by the present invention which provides a method and apparatus ...
|
|
|
Techniques for measuring the thickness of a film formed on a substrate
These and other objects are accomplished by the various aspects of the present invention, wherein, briefly and generally, the thickness of a film is determined by ...
|
|
|
Rotatable substrate supporting mechanism with temperature sensing device for use in chemical vapor deposition equipment
In accordance with the present invention, a new and useful rotatable substrate supporting mechanism is disclosed for use in single substrate chemical vapor deposition ...
|
|
|
Sensor for semiconductor device manufacturing process control
The present invention accordingly provides an apparatus and method for non-invasive in-situ measurements of physical properties of metal and polycrystalline layers as ...
|
|
|
Semiconductor wafer temperature determination by optical measurement of wafer expansion in processing apparatus chamber
It is a primary objective of the present invention to provide a method and apparatus for instantaneously and accurately determining the temperature of thin plate-like ...
|
|
|
***WITHDRAWN PATENT AS PER THE LATEST USPTO WITHDRAWN LIST*** *** NO IMAGES AVAILABLE***
Description:...
|
|
|
Musical drum lighting apparatus
In view of the foregoing disadvantages inherent in the known types of musical lighting apparatus now present in the prior art, the present invention provides a musical ...
|
|
|
Light source system
What is claimed is: 1. A light source system comprising a concave reflecting mirror of semi-elliptical and cylindrical shape, a linear light emitter arranged at one ...
|
|
|
Arm-knee and leg guard for desks and file cabinets
These and other objects are accomplished in accordance with the present invention by providing a body guard assembly for preventing injuries on impact with protruding ...
|