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Ozone generator and ozone generating method
| Details |
Inventors: Kaiga, Nobuyoshi; Takase, Osamu;
Assignee: Kabushiki Kaisha Toshiba (Kawasaki, JP)
Primary Examiner: Kyle; Deborah L.
Assistant Examiner: Eldred; J. Woodrow
Attorney, Agent or Firm: Oblon, Spivak, McClelland, Maier & Neustadt
An ozone generator includes a feed gas chamber for receiving a feed gas, an ozone gas chamber for receiving a produced ozone gas, a tubular electrode for connecting the two chambers, a discharge tube inserted in the tubular electrode, and a power source unit for applying a voltage having a frequency higher than a frequency of commercial power between a metal film and the tubular electrode to generate a discharge having a frequency higher than the frequency of commercial power. The discharge tube is constituted by a glass tube and the metal film coated on the inner surface of the glass tube. The metal film is made of stainless steel in order to improve an ozone resistance and a nitric acid resistance and is formed to have a thickness of 2,0000 .ANG. to 5,000 .ANG. in order to prevent generation of sparks and to enhance a thermal shock resistance. |
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DETAILED DESCRIPTION The present invention has been made in consideration of the above situation and has as its object to provide an ozone generator comprising a discharge tube having a conductive film which has good ozone and nitric acid resistances and which is not easily peeled.
In order to achieve the above object, experiments were conducted and it was found that peeling of a stainless steel film of a discharge tube can be prevented by setting the thickness of the stainless steel film to be 2,000 .
ANG.
to 5,000 .
ANG.
.
According to the present invention, therefore, on the basis of this experimental result, in an ozone generator in which a stainless steel film is formed on the inner surface of a dielectric tube, and a high-frequency voltage is applied to the stainless steel film to perform silent discharge, thereby generating ozone, the thickness of the stainless steel film is set to be 2,000 to 5,000 .
ANG.
.
In addition, an ozone generating method according to the present invention comprises: the step of coating a metal film on a dielectric tube to have a thickness of 2,000 .
ANG.
to 5,000 .
ANG.
thereby tube a discharge tube; the step of flowing a feed gas containing oxygen around the discharge tube; the step of generating electric power having a frequency higher than a frequency of commercial power; and the step of supplying the power obtained by the generating step to the discharge tube to generate silent discharge, thereby generating ozone.
With the above arrangement, an ozone generator comprising a discharge tube having a stainless steel film which is, both electrically and thermally, not easily peeled and an ozone generating method are provided.
Additional objects and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention.
The objects and advantages of the invention may be realized and obtained by means of the instrumentalities and combinations particularly pointed out in the appended claims
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