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System and method for producing oscillating magnetic fields in working gaps useful for irradiating a surface with atomic and molecular ions
| Details |
Inventors: Glavish, Hilton F.;
Assignee: Nissin Electric Co., Ltd. (Kyoto, JP)
Primary Examiner: Berman; Jack I.
Assistant Examiner:
Attorney, Agent or Firm: Fish & Richardson
Deflection apparatus is shown for high perveance ion beams, operating at 20 Hz fundamental and substantially higher order harmonics, having a magnetic structure formed of laminations with thickness in range between 0.2 and 1 millimeter. Additionally, a compensator is shown with similar laminated structures with resonant excitation circuit, operating at 20 Hz or higher, in phase locked relationship with the frequency of the previously deflected beam. Furthermore, features are shown which have broader applicability to producing strong magnetic field in magnetic gap. Among the numerous important features shown are special laminated magnetic structures, including different sets of crosswise laminations in which the field in one lamination of one set is distributed into multiplicity of laminations of the other set of coil-form structures, field detection means and feedback control system, cooling plate attached in thermal contact with number of lamination layers. Surfaces on the entry and exit sides of the compensator magnetic structure have cooperatively selected shapes to increase the length of path exposed to the force field dependently with deflection angle to compensate for contribution to deflection angle caused by higher order components. The entry and exit surfaces of the magnetic scanner and compensator structures cooperating to produce desired beam profile and desired limit on angular deviation of ions within the beam. Also shown is an accelerator comprising a set of accelerator electrodes having slotted apertures, a suppressor electrode at the exit of the electrostatic accelerator, a post-accelerator analyzer magnet having means for adjusting the angle of incidence by laterally moving the post-accelerator analyzer magnet, and a magnet to eliminate aberration created by the post-accelerator analyzer magnet. In the case of use of a spinning substrate carrier for scanning in one dimension, the excitation wave form of the scanner relates changes in scan velocity in inverse dependence with changes in the radial distance of an implant point from the rotation axis. Also an oxygen implantation method is shown with 50 mA ion beam current, the ion beam energy above 100 KeV, and the angular velocity of a rotating carrier above 50 rpm. |
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DETAILED DESCRIPTION What is claimed is: 1.
A magnetic scanning system for rapidly sweeping a high perveance beam of atomic or molecular ions over a selected surface, said beam initially propagating in a predetermined direction, said scanning system comprising a magnetic scanning structure and an associated scanning excitation circuit for repeatedly sweeping said ion beam in one dimension in response to an oscillating magnetic field having a fundamental frequency and higher order harmonics induced by excitation current from said circuit, and a separate magnetic compensating structure and associated compensating excitation circuit spaced from said scanning structure along the beam axis, for continuously deflecting said ion beam after it has been swept by said scanning structure, to re-orient the beam to a direction substantially parallel to an output axis of said system, said scanning circuit and said compensating circuit having separate power sources having wave forms at the same fundamental frequency for their respective scanning and compensating functions, said circuits being in constant phase relationship with a predetermined phase angle difference.
2.
The magnetic scanning system of claim 1 having means to produce different, complementary wave forms for said scanning and compensating circuits.
3.
The magnetic scanning system of claim 1 in which the ratio of the lateral width of the gap at the entrance of said magnetic scanning structure to the gap spacing is of the order of 3 to 1.
4.
The magnetic scanning system of claim 1 wherein the lateral width of pole pieces of said scanning structure and said compensating structure increase along the length of the beam axis to accommodate a progressively wider beam sweep.
5.
The magnetic scanning system of claim 1 wherein said magnetic scanning structure comprises a plurality of laminations of high magnetic permeability material having thickness in the range between about 0.
2 and 1 millimeter, said laminations being separated by relatively thin electrically insulating layers, said laminations forming a yoke connecting pole pieces that define a gap through which said ion beam passes, said laminations providing a low reluctance magnetically permeable path for said fundamental frequency and higher order harmonic components of said magnetic field, the laminations serving to confine induced eddy currents to limited values in local paths in respective laminations
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Lighting 
