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System and method for attenuating the effect of ambient light on an optical sensor
The present invention provides systems and methods for attenuating the effect of ambient light on optical sensors and for measuring and compensating quantitatively for ...
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Projection exposure apparatus
In consideration of the foregoing, the object of the present invention is to provide a projection exposure apparatus capable of eliminating the drawbacks of the ...
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Partial coherence varier for microlithographic system
A microlithographic projection imager 10 suitable for the inventive partial coherence varier is schematically illustrated in FIG. 1. It includes an illuminator 20 and ...
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Illuminating arrangement including a zoom objective incorporating two axicons
It is an object of the invention to provide an especially flexible, adjustable illumination system which allows a multitude of illumination modes by adjusting components ...
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Illuminating system for vacuum ultraviolet microlithography
What is claimed is: 1. An illuminating system for vacuum ultraviolet microlithography comprising along an optical axis of the system: a vacuum ultraviolet light source; ...
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Zoom illumination system for use in photolithography
OF THE PREFERRED EMBODIMENTS I. Example Illumination System FIG. 1A is an illustration of an example illumination system 100 at a first zoom position, according to the ...
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Illuminating system of a microlithographic projection exposure arrangement
It is an object of the invention to provide an illuminating system for vacuum ultraviolet microlithography which operates in the vacuum ultraviolet range. A first ...
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Advanced illumination system for use in microlithography
The present invention generally relates to illumination systems in photolithography. More specifically, the present invention relates to systems and methods for varying ...
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Illumination system and method for efficiently illuminating a pattern generator
An embodiment of the present invention provides a system that substantially increases optical efficiency and substantially reduces or eliminates the generation of stray ...
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Scratch suppressing illumination system for photographic printer
The problem described above is solved according to the present invention by providing an illumination system for a photographic printer, having a printing lens and a ...
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