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Reactive sputter cleaning of semiconductor wafer
Accordingly, it is an object of the present invention to provide a method for improving the yield in the manufacturing of semiconductor wafers. Another object of this ...
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Vacuum chamber slit valve
In view of the above discussion, it is an object of the present invention to provide a compact wafer entrance slit and slit closure valve mechanism for a vacuum chamber. ...
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Method of thermally treating semiconductor wafers in furnace and wafer hanger useful therein
The present invention is directed to a method of thermally treating semiconductor wafers by heating the wafers in furnace having a heating space. According to the ...
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Forced cooling apparatus for heat treatment apparatus
This invention relates to the forced cooling apparatus for a heat treatment apparatus having a forced cooling apparatus that allows air to flow into a gap formed between ...
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Orthodontic aid
I claim: 1. An orthodontic aid for transferring tooth correcting forces supplied by an arch wire to a tooth comprising a substantially plastic body having a lower ...
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Wafer handling apparatus and method
A method and apparatus of heating a silicon wafer to bake off a solvent used in applying a photoresist to the wafer or to bake off a liquid used in washing or cleaning ...
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Heating sheet
It is, therefore, an object of the present invention to provide a safe, economical and convenient heating sheet which overcomes the aforementioned problems of prior art ...
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Brewed beverage maker with unpressurized boiler vessel steam generator tube and common heating element
What is claimed is: 1. A brewed beverage maker comprising, unpressurized vessel structure for storing water for use in making a brewed beverage, tube structure having an ...
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Method of increasing the gettering effect in the bulk of semiconductor bodies utilizing a preliminary thermal annealing step
In brief, and in reference to the prior art, the part taken by oxygen precipitates to ensure the internal impurity gettering effect is well-known but the formation of ...
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Pulse anneal method for solar cell
What is claimed: 1. The method of making a solar cell which comprises the steps of depositing on a substrate a first layer of n-type amorphous silicon, followed by a ...
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Lighting 
