Method for heating semiconductor wafer by means of application of radiated light
With the foregoing in view, the present invention has as its object the provision of a heating method of a semiconductor wafer by means of application of radiated light without developing such large "... Read More
Inventors: Shimizu, Hiroshi;, Assignee: Ushio Denki Kabushiki Kaisha (Tokyo, JP) |
Rotatable substrate supporting mechanism with temperature sensing device for use in chemical vapor deposition equipment
In accordance with the present invention, a new and useful rotatable substrate supporting mechanism is disclosed for use in single substrate chemical vapor deposition equipment. The rotatable substrat... Read More
Inventors: deBoer, Wiebe B.; Ozias, Albert E.;, Assignee: |
Optical system using a luminescent material sensor for measuring very high temperatures
Accordingly, these and other objects are accomplished by the various aspects of the present invention wherein, briefly, the temperature of a thermal radiating source is measured in a very high tempera... Read More
Inventors: Wickersheim, Kenneth A.; Sun, Mei H.;, Assignee: Luxtron Corporation (Mountain View, CA) |
Rotatable substrate supporting susceptor with temperature sensors
In accordance with the present invention, a new and useful rotatable substrate supporting mechanism is disclosed for use in single substrate chemical vapor deposition equipment. The rotatable substrat... Read More
Inventors: deBoer, Wiebe B.; Ozias, Albert E.;, Assignee: Epsilon Technology, Inc. (Phoenix, AZ) |
Semiconductor wafer temperature measurement system and method
Other objects and advantages will be obvious, and will in part appear hereinafter and will be accomplished by the present invention which provides a method and apparatus for measuring the temperature ... Read More
Inventors: Loewenstein, Lee M.; Lawrence, John D.; Fisher, Wayne G.; Davis, Cecil J.;, Assignee: Texas Instruments Incorporated (Dallas, TX) |
Techniques for measuring the thickness of a film formed on a substrate
These and other objects are accomplished by the various aspects of the present invention, wherein, briefly and generally, the thickness of a film is determined by measuring the emissivity of the film ... Read More
Inventors: Schietinger, Charles W.; Adams, Bruce E.;, Assignee: Luxtron Corporation (Santa Clara, CA) |
Rotatable substrate supporting mechanism with temperature sensing device for use in chemical vapor deposition equipment
In accordance with the present invention, a new and useful rotatable substrate supporting mechanism is disclosed for use in single substrate chemical vapor deposition equipment. The rotatable substrat... Read More
Inventors: deBoer, Wiebe B.; Ozias, Albert E.;, Assignee: Epsilon Technology, Inc. (Tempe, AZ) |
Sensor for semiconductor device manufacturing process control
The present invention accordingly provides an apparatus and method for non-invasive in-situ measurements of physical properties of metal and polycrystalline layers as well as semiconductor wafer surfa... Read More
Inventors: Moslehi, Mehrdad M.;, Assignee: Texas Instruments Incorporated (Dallas, TX) |
Semiconductor wafer temperature determination by optical measurement of wafer expansion in processing apparatus chamber
It is a primary objective of the present invention to provide a method and apparatus for instantaneously and accurately determining the temperature of thin plate-like articles such as semiconductor wa... Read More
Inventors: Ishikawa, Hiroichi; Kolesa, Michael S.;, Assignee: |
***WITHDRAWN PATENT AS PER THE LATEST USPTO WITHDRAWN LIST*** *** NO IMAGES AVAILABLE***
Description:... Read More
Inventors: , Assignee: |
Musical drum lighting apparatus
In view of the foregoing disadvantages inherent in the known types of musical lighting apparatus now present in the prior art, the present invention provides a musical drum lighting apparatus wherein ... Read More
Inventors: Schmidt, Randall S.;, Assignee: |
Light source system
What is claimed is: 1. A light source system comprising a concave reflecting mirror of semi-elliptical and cylindrical shape, a linear light emitter arranged at one focus position of the mirror, a cyl... Read More
Inventors: Inoue, Yasuo;, Assignee: Olympus Optical Company Limited (Tokyo, JP) |
Arm-knee and leg guard for desks and file cabinets
These and other objects are accomplished in accordance with the present invention by providing a body guard assembly for preventing injuries on impact with protruding surfaces of drawers. The body gua... Read More
Inventors: Hadad, Ronald E.;, Assignee: |
Reflector for use in an artificial lighting device
I claim: 1. An artifical lighting assembly comprising: an artifical source of illumination having spherical geometry; a concave, open-ended reflector that is rotationally symmetric about a given axis ... Read More
Inventors: Mader, John J.;, Assignee: Polaroid Corporation (Cambridge, MA) |
Optical system for synthesizing plural light beams
Accordingly, it is an object of the present invention to provide an optical system which can synthesize a plurality of light beams of substantially the same wavelength with a small angle difference be... Read More
Inventors: Kato, Kiichi; Sakamoto, Masaharu;, Assignee: Olympus Optical Co., Ltd. (Tokyo, JP) |
Device for feeding fiber or cable through a housing
OF THE INVENTION Shown in FIG. 1 is an implementation of the present invention in a telecommunications chassis 10. Chassis 10 has a front end 10a, a rear end 10b, sides 10c and 10c, a top 10e and a b... Read More
Inventors: Bluband, Zakhary;, Assignee: ADC Telecommunications, Inc. (Minneapolis, MN) |
Solar concentrator
I claim: 1. A solar radiation concentrator comprising: trough means, having an open portion, for reflecting solar radiation incident thereupon; refracting means, covering said open portion of said tro... Read More
Inventors: Szulmayer, Wally;, Assignee: Unisearch Limited (AU) |
Radiant energy collector
A device is provided for reflecting radiant energy incident thereon onto the surface of an energy absorber. The device is positioned spaced apart from the absorber and includes a plurality of adjacent... Read More
Inventors: McIntire, William R.;, Assignee: University Patents, Inc. (Norwalk, CT) |
Antireflection coating for infrared light
An object of the present invention is to provide an antireflection coating which is formed on a silicon or germanium substrate used as a substrate of optical parts for infrared light in the wavelength... Read More
Inventors: Hatano, Takuji; Fukumoto, Mariko;, Assignee: Minolta Camera Kabushiki Kaisha (Osaka, JP) |
Optical light guide for dental light-curing lamps
An optical light guide composed of a solid, transparent material selected from the class consisting of glass, acrylic, polystyrene, or polycarbonate has been developed, in accordance with the present ... Read More
Inventors: Friedman, Joshua; Dell, Brian;, Assignee: |
Fiber optic cable end connector
An end connector in accordance with the present invention has a housing member with a through passageway extending from a front end to a rear end thereof. A coupling unit is provided for coupling the ... Read More
Inventors: Szegda, Andrew;, Assignee: John Mezzalingua Assoc. Inc. (Manlius, NY) |
Endoscope light source apparatus with detachable flash unit
An object of the present invention is to provide an endoscope light source apparatus which is useful when a system is constructed in accordance with an environment in which it is used or conductions u... Read More
Inventors: Uchimura, Sumihiro;, Assignee: Olympus Optical Co., Ltd. (Tokyo, JP) |
Light source assembly
The present invention contemplates a low profile light source having a slideout, replaceable lamp assembly and resilient clamp for accommodating thermal expansion as well as partitioned and fan coole... Read More
Inventors: Chin, Noelle S.; Beland, Jr., Ernest E.;, Assignee: Luxtec Corporation (Worcester, MA) |
Insulation shield for recessed downlighting fixtures
The invention provides an insulation shield mountable to a lighting fixture, such as a downlighting fixture, which shield functions to increase the permissible lamp wattage which can be used particula... Read More
Inventors: Hentz, Joseph A.;, Assignee: NSI Enterprises, Inc. (Atlanta, GA) |
Additive color-mixing light fixture employing a single moveable multi-filter array
The improved color mixing fixture of the present invention achieves these and additional objects in an apparatus of unusual simplicity. The improved color mixing fixture of the present invention dispo... Read More
Inventors: Callahan, Michael;, Assignee: |
One-piece spacer end cap for an elongated jacketed discharge lamp
The present invention provides an improved spacer end cap for each end of an elongated jacketed discharge lamp being designed to satisfy the aforementioned needs. A first improved feature incorporated... Read More
Inventors: Shanks, Bruce E.;, Assignee: General Electric Company (Schenectady, NY) |
Beta copper base alloy adapted to be formed as a semi-solid metal slurry and a process for making same
We claim: 1. A process for making a copper base alloy adapted to be formed in a semi-solid slurry condition comprising: providing an alloy consisting essentially of from about 9% to about 10.5% by wei... Read More
Inventors: Ashok, Sankaranarayanan; Breedis, John F.;, Assignee: Olin Corporation (New Haven, CT) |
Pyrolysis furnace
OF THE PREFERRED EMBODIMENT The furnace assembly according to our invention includes a straight, vertically-disposed refractory tube 11 of generally circular cross-section which defines a chamber whe... Read More
Inventors: Stephens, Thomas M.; Takahashi, Yoshihiro;, Assignee: Envirotech Corporation (Menlo Park, CA) |
P-Glass reflow technique
What is claimed is: 1. A method for reflowing a P-glass layer which comprises: (a) overcoating said P-glass layer with a radiation absorbing material whose reflectivity increases upon melting; (b) exp... Read More
Inventors: Biegelsen, David K.; Sirkin, Eric R.;, Assignee: Xerox Corporation (Stamford, CT) |
Diffusers
1. A diffuser assembly for transmitting thermal energy by conduction across metallic members and convection of a heat-treating gas in an annealing furnace comprising: (a) a diffuser member having a ge... Read More
Inventors: Corbett, Reg D.;, Assignee: |
Lighting 
