RF match detector circuit with dual directional coupler
In general, in one aspects the invention is a detector circuit for controlling an RF match circuit that receives an RF power signal from an RF source and delivers RF power signal to a load. The RF mat... Read More
Inventors: Stimson, Bradley O.;, Assignee: Applied Materials, Inc. (Santa Clara, CA) |
Plasma reactor using UHF/VHF and RF triode source, and process
OF THE PREFERRED EMBODIMENT(S) 1. Overall System FIG. 1 is a schematic sectional view of a plasma reactor chamber system 10 which uses a plural (two or more) electrode plasma source arrangement, a ma... Read More
Inventors: Collins, Kenneth S.;, Assignee: Applied Materials, Inc. (Santa Clara, CA) |
Electrostatic chuck
Having described the invention, what is claimed as new and desired to be secured by Letters Patent is: 1. An electrostatic wafer-holding chuck, comprising: a first dielectric plate formed of single cr... Read More
Inventors: Bates, Herbert E.;, Assignee: Saphikon Inc. (Milford, NH) |
Vacuum processing chamber having multi-mode access
A configuration according to the invention includes a chamber for processing a workpiece having a multi-mode chamber service access configuration. The chamber has body subunit with a pedestal defining... Read More
Inventors: Rice, Michael; Askarinam, Eric; Schneider, Gerhard; Collins, Kenneth S.;, Assignee: Applied Materiels, Inc. () |
Method and apparatus for microwave assisting sputtering
The object of the present invention is to improve the film-forming performance which is necessary to industrially apply the sputtering technique. A more specific object of the present invention is to ... Read More
Inventors: Saito, Hiroshi; Suzuki, Yasumichi; Sano, Shuuzoo; Shimizu, Tamotsu; Aiuchi, Susumu;, Assignee: Hitachi, Ltd. (Tokyo, JP) |
High density plasma deposition and etching apparatus
The present invention utilizes whistler waves to generate plasmas of high density for use in plasma etching, deposition, and sputtering equipment. The efficient generation of plasma depends strongly o... Read More
Inventors: Campbell, Gregor; Conn, Robert W.; Shoji, Tatsuo;, Assignee: Plasma & Materials Technologies, Inc. (Burbank, CA) |
Sputtering method and apparatus using a trigger gas feed
An object of the present invention is to provide a sputtering method and a sputtering apparatus using triggering of a discharge gas, whereby a pressure in a vacuum chamber before a discharge is starte... Read More
Inventors: Okuda, Akira; Yokoyama, Masahide; Hayata, Hiroshi;, Assignee: Matsushita Electric Industrial Co. (Osaka-fu, JP) |
Vibrating beam accelerometer with velocity change output
The present invention provides a dual sensor frequency output accelerometer that does not require either high sampling rates or mechanical matching of the sensors to achieve a high level of accuracy. ... Read More
Inventors: Peters, Rex B.;, Assignee: Sundstrand Data Control, Inc. (Redmond, WA) |
Optical fiber display device
The invention provides an improved signal display means. According to the invention, light-transmitting cones are provided at the ends of the light-transmitting fibers or at the ends of the bundles of... Read More
Inventors: Kriege, Wolfgang;, Assignee: Jenaer Glaswerk Schott & Gen. (Mainz, DT) |
Lighting system
It is, therefore, an object of the invention to broaden the field of use of lighting systems comprising such high output lamps which, because of their extremely high luminance, have hitherto only been... Read More
Inventors: Bartenbach, Christian;, Assignee: |
Reflector and light system
With the foregoing in mind, it is a principal object of this invention to provide reflector and light system that provides a relatively compact, optically efficient and cost effective light source for... Read More
Inventors: Parker, Jeffrey R.;, Assignee: Lumitex, Inc. (North Royalton, OH) |
Light guide with virtually cylindrical convex lens
OF THE INVENTION With reference to FIGS. 1 and 2, a light source 1 which is preferably a laser diode emits a light beam 3 of a given diameter. The light beam is passed through double convex lens 5 wh... Read More
Inventors: Elderfield, David V.;, Assignee: |
Light device having first and second optical systems arranged substantially 90.degree. apart
One of the features of the present invention is the creation of a lighting device with two light pipes, using a single lamp and having a total available light-pipe output which is substantially double... Read More
Inventors: Nath, Gunther;, Assignee: |
Lamp-to-light guide coupling arrangement for an electrodeless high intensity discharge lamp
OF THE PREFERRED EMBODIMENTS In the drawings figures, in which like reference numerals or characters refer to like parts, FIG. 1A shows a lamp-to-light guide coupling arrangement, generally designate... Read More
Inventors: Davenport, John M.; Duffy, Mark E.; Hansler, Richard L.; King, Kenneth S.; Cassarly, William J.; Parham, Thomas G.; Allen, Gary R.; Dakin, James T.; Ahlgren, Frederic F.;, Assignee: General Electric Company (Schenectady, NY) |
Lighting system for mass-transit vehicles
In accordance with this invention, an improved lighting system is provided for illuminating a passenger seating area in a mass transit vehicle. The improved system replaces fluorescent tubes with one ... Read More
Inventors: Dealey, Jr., Onward K.; Domas, Ben V.; McCauley, Alvin D.;, Assignee: Transmatic, Inc. (Waterford, MI) |
Variable duty cycle, multiple frequency, plasma reactor
We claim: 1. Plasma reactor apparatus comprising: first, second and third electrodes defining an enclosed volume for receiving an article to be treated; a source of high frequency signal; a source of ... Read More
Inventors: Corn, Glenn R.; Hegedus, Andreas G.;, Assignee: Tegal Corporation (Novato, CA) |
Test pattern for use monitoring variations of critical dimensions of patterns during fabrication of semiconductor devices
. Accordingly, it is an object of the present invention to provide an improved test pattern (CD bar) which can easily monitor both the increase and the decrease of CD variations of patterns in the pre... Read More
Inventors: Lee, Won-Sik;, Assignee: SamSung Electronics Co., Ltd. (Suweon, KR) |
Method and apparatus for controlling thermal transfer in a cyclic vacuum processing system
According to the present invention, these and other objects and advantages are achieved in methods and apparatus for providing thermal transfer between a workpiece and a heat sink or source in a vacuu... Read More
Inventors: Turner, Norman L.;, Assignee: Varian Associates, Inc. (Palo Alto, CA) |
Air heater for corrosive atmospheres
OF THE INVENTION With reference to the drawing, one sees that in this embodiment, the air heater designated as a whole by reference 10 includes two tubular nests 16, 18 of countercurrent type, meanin... Read More
Inventors: Braud, Yves;, Assignee: Stein Heurtey (Evry Cedex, FR) |
In-line filament cleaner and adhesive applicator
In acordance with the practice of the present invention, there is provided an in-line filament cleaning and adhesive applying apparatus which includes two tanks in a side-by-side relation, the first c... Read More
Inventors: Schotter, Daniel K.;, Assignee: Hughes Aircraft Company (Los Angeles, CA) |
Rotatable inspection table
What is claimed is: 1. A device for supporting and holding an object in place, said device comprising, in combination: a shaft mounted for rotation about a rotation axis; a top plate coupled to and ro... Read More
Inventors: Demand, Erhart E.;, Assignee: Temptronic Corporation (Newton, MA) |
Method and apparatus for recycling thermal energy
OF THE INVENTION We shall refer first to FIG. 1, which illustrates a device forming an evaporator-mixer according to the invention, shown in its entirety EM, making it possible to transfer an amount ... Read More
Inventors: Le Goff, Pierre Y. J.;, Assignee: Centre National de la Recherche Scientifique (FR) |
Wafer processing system
These objects of the invention and other objects, features and advantages to become apparent as the specification progresses are accomplished by the invention, according to which, briefly stated, a wa... Read More
Inventors: Layman, Frederick P.; Huntley, David A.; Dick, Paul H.; Coad, George L.; Kuhlman, Michael J.; Vecta, Roger M.; Hobson, Phillip M.;, Assignee: Varian Associates, Inc. (Palo Alto, CA) |
Heating and handling system for objects
General Organization Referring first to FIGS. 1 and 2 apparatus, the charge 20 to be treated, shown as having been transferred into an entrance chamber 70, associated with station 1B, typically consi... Read More
Inventors: Hailey, Robert W.;, Assignee: |
Apparatus for loading containers on to ships and unloading them therefrom
We claim: 1. Apparatus for loading containers onto and unloading containers from ships which receive the containers at locations of varying height, comprising a quayside carrier framework (22) and a t... Read More
Inventors: Tax, Hans; Hosler, Klaus;, Assignee: Tax Ingenieurgesellschaft mbH (Munich, DE) |
Wafer holder with spring-loaded wafer-holding means
OF THE INVENTION In FIG. 1, a top view of a wafer holder 1 is shown. The wafer holder 1 is typically formed of a non-magnetic frame 55 such as a non-magnetic stainless steel. A non-magnetic material ... Read More
Inventors: Zasio, Gabriel;, Assignee: Fujitsu Limited (Kawasaki, JP) |
Mask alignment apparatus
The alignment apparatus 10 comprises a substantially planar ring plate 11 which is movable in a finite arc of rotation and along x and y axis coordinates with respect to fixed support fingers 12a, 12... Read More
Inventors: Husain, Anwar;, Assignee: Micronix Partners (Los Gatos, CA) |
Vehicle conveyer for a multi-story parking garage
The present invention is a vehicle conveyer device and system which is capable of conveying a vehicle automatically between the entrance or a multi-story parking garage and a parking space and from th... Read More
Inventors: Yamashita, Kyoichi;, Assignee: Koyojidoki Company Limited (Yokohama, JP) |
Degenerate four-wave mixer using multiple quantum well structures
The foregoing problem, the design of a degenerate four-wave mixer used in conjunction with the low light intensities supplied by available diode lasers, has been solved in accordance with the present ... Read More
Inventors: Chemla, Daniel S.; Miller, David A. B.; Smith, Peter W.;, Assignee: AT&T Bell Laboratories (Murray Hill, NJ) |
Heterostructure semiconductor device
It is an object of the present invention to provide a new way for increasing the charge carrier mobility in a heterostructure semiconductor body or device. A heterostructure semiconductor body is prov... Read More
Inventors: Abstreiter, Gerhard; Ploog, Klaus; Fischer, Albrecht;, Assignee: Max-Planck-Gesellschaft zur Foerderung der Wissenschaften e.V. (DE) |
Lighting 
