Driving apparatus for industrial robot
OF THE INVENTION In conjunction with the drawings, one embodiment of this invention will be described in detail. FIG. 1 shows a cross-sectional side view of an embodiment suitable for the invention. ... Read More
Inventors: Yokose, Kazutoshi; Makishima, Yutaka; Higake, Masatoshi; Shioda, Toshimi; Nagai, Masahide; Noda, Minoru;, Assignee: Seiko Instruments & Electronics Ltd. (Tokyo, JP) |
Pressure-resistant thermal reactor system for semiconductor processing
A thermal reactor system for semiconductor processing comprises a reaction vessel, a wafer support within the vessel, a gas source, a vacuum system, seals through which the gas source and vacuum syste... Read More
Inventors: Adams, David V.; Anderson, Roger N.; Deacon, Thomas E.;, Assignee: Applied Materials, Inc. (Santa Clara, CA) |
Actuator or adjusting drive
What is claimed is: 1. Actuator or adjusting drive having an electric drive motor with an output shaft connected to an actuating shaft and a position transmitter, comprising respective drive gears mou... Read More
Inventors: Blaser, Peter-Theobald; Hofheinz, Walter;, Assignee: Heidelberger Druckmaschinen AG (Heidelberg, DE) |
Method and apparatus for mass transfer in multiple hearth funaces
Briefly, according to this invention, there is provided an apparatus for mass transfer in hearth-type furnaces which have a center shaft with a plurality of radially extending arms. The arms extend ov... Read More
Inventors: Nell, David J.;, Assignee: |
Particle-free dockable interface for integrated circuit processing
OF THE INVENTION Conceptually, the SMIF system has two parts: (1) a clean air canopy around the wafer handling apparatus of each piece of processing equipment; and (2) a small clean air box to carry ... Read More
Inventors: Tullis, Barclay J.; Parikh, Mihir; Thrasher, David L.; Johnston, Mark E.;, Assignee: Hewlett-Packard Company (Palo Alto, CA) |
Automatic vacuum gripper
The automatic vacuum gripper of the present invention comprises a cylinder that may be ported to vacuum. A piston slidably disposed in the cylinder is coupled to a gripper through a shaft. A vacuum pa... Read More
Inventors: Sniderman, Albert;, Assignee: Unisys Corporation (Blue Bell, PA) |
Semiconductor wafer transfer apparatus with back-to-back positioning and separation
OF THE INVENTION Referring now to FIG. 1, there is illustrated a perspective view of the wafer handling apparatus of the present invention. This invention relates to U.S. Pat. No. 4,695,217 issued Se... Read More
Inventors: Lau, John J.; Fang, Si-Ming;, Assignee: Mactronix, Inc. (Dallas, TX) |
Pushing device
OF THE INVENTION One embodiment of the present invention will be described below with reference to the accompanying drawings. Motor supporting plates 4 is mounted to a vertically installed base plate... Read More
Inventors: Torihata, Minoru; Sugiura, Kazuo; Mii, Tatsunari;, Assignee: Kabushiki Kaisha Shinkawa (Tokyo, JP) |
Process for the production of saccharified starch products
What is claimed is: 1. A process for the production of saccharified starch products with a higher maltose purity, comprising subjecting a starch hydrolysate with an 80% or more maltose purity to the a... Read More
Inventors: Sakai, Shuzo;, Assignee: Kabushiki Kaisha Hayashibara Seibutsu Kagaku Kenkyujo (Okayama, JA) |
Foodstuffs containing starch of a dull waxy genotype
What is claimed is: 1. A thickened foodstuff comprising a foodstuff, water and having as an essential thickening ingredient an effective amount of a natural chemically modified starch, said natural ch... Read More
Inventors: Friedman, Robert B.; Gottneid, David J.; Faron, Eugene J.; Pustek, Frank J.; Katz, Frances R.;, Assignee: American Maize-Products Company (Stamford, CT) |
Partially debranched starch clouds
I claim: 1. A method for preparing a stable, opaque cloud, which comprises dispersing in a fluid a partially debranched starch, in an amount effective to form the cloud, up to 1%, by weight, which sta... Read More
Inventors: Chiu, Chung-Wai;, Assignee: National Starch and Chemical Investment Holding Corporation (Wilmington, DE) |
Method for removing organic deposits from sand particles with laser beam
What is claimed is: 1. A method for removing organic deposits selected from the group consisting of polystyrene, styrene monomer, phenolic residue, aldehydes, and carbonaceous materials, from surfaces... Read More
Inventors: Yeung, Flora; Jackson, Meryl R.;, Assignee: Hughes Aircraft Company (Los Angeles, CA) |
Processing apparatus
It is a primary object of the present invention to provide a novel processing technique which enables prevention of the outside air from being induced to enter the reaction tube and thereby allows exc... Read More
Inventors: Kanegae, Masatomo; Kogano, Takayoshi; Ito, Fumio;, Assignee: Hitachi, Ltd. (Tokyo, JP); Hitachi VLSI Engineering Corp. (Tokyo, JP); Hitachi Tokyo Electronics Co. (Tokyo, JP) |
Liquid nutrient dispensers for aquarium biological filter media
The invention provides for a dispenser for liquid nutrients used to sustain the metabolism of biological filter media used in purifying aquarium water, which dispenser comprises: a rigid container hav... Read More
Inventors: Eyas, Andres V.;, Assignee: International Seaboard Corp. (Chicago, IL) |
Device for holding a substrate
What is claimed is: 1. A device for holding a substrate of substantially circular shape comprising; a plate having at least one substantially circular opening disposed therein, said plate having a par... Read More
Inventors: Mahler, Peter;, Assignee: Leybold Heraeus GmbH (Cologne, DE) |
Substrate holder for wafers during MBE growth
To achieve the foregoing and other objects, a holder for supporting a compound semiconductor wafer during MBE heating may comprise: a first ring; a second ring; a back plate fixedly attached to the se... Read More
Inventors: Nilsson, Boo;, Assignee: Litton Systems, Inc. (Beverly Hills, CA) |
Apparatus for the synthesis of diamond-like thin films
OF THE INVENTION The present invention will be described further with reference to the preferred embodiment. In the following embodiment, description is given only for the examples and it should be u... Read More
Inventors: Nakayama, Masatoshi; Ueda, Kunihiro; Shibahara, Masanori;, Assignee: TDK Corporation (Tokyo, JP) |
Paint stripping composition
OF THE PREFERRED EMBODIMENTS The present invention provides a composition consisting essentially of a mixture of the monobutyl ether of ethylene glycol and isopropyl alcohol. The present mixture cont... Read More
Inventors: Howe, Charles R.;, Assignee: |
Method and apparatus for sequencing wafers in a multiple chamber, semiconductor wafer processing system
The invention provides a multiple chamber processing system with a multi-tasking process control including a process sequencer which can look ahead in the process sequence and identify a deadlocked wo... Read More
Inventors: Nguyen, Thu; Lavi, Michal;, Assignee: Applied Materials Inc. (Santa Clara, CA) |
Film forming apparatus and method, and film modifying apparatus and method
OF THE INVENTION The embodiments of the present invention will be described below with reference to the accompanying drawing. A film forming apparatus and method according to the first aspect will be... Read More
Inventors: Shinriki, Hiroshi; Sugiura, Masahito;, Assignee: Tokyo Electron Limited (Tokyo, JP) |
Short fiber-containing down-feather wadding and process for producing the same
It is an object of the present invention to provide a novel short fiber-containing down-feather wadding in which synthetic or natural fibers are uniformly incorporated into down-feathers, and a proces... Read More
Inventors: Kawada, Yukihiro;, Assignee: |
Entrance system for a photodetector having a 180 degree image angle and detector provided therewith
It is therefore an object of the present invention to provide an improved radiation detector for sunlight of any selectable wavelength. A further object of the invention resides in the provision of an... Read More
Inventors: Junkermann, Wolfgang;, Assignee: Kernforschungsanlage Juelich Gesellschaft mit beschraenkter Haftung (Juelich, DE) |
Thermal processing apparatus and process
It is an object of this invention to provide a rapid heating and cooling thermal treatment apparatus and process with heating rates of from 50.degree. to 100.degree. C./min and cooling rates up to 50.... Read More
Inventors: Porter, Cole D.; Sanchez, Jessie R.; Kowalski, Jeffrey M.;, Assignee: Silicon Valley Group, Inc. (San Jose, CA) |
Temperature adjusting system adapted for use in an electric vehicle and the like
Therefore, the present invention has been developed in order to solve the above mentioned problems involved in the conventional temperature adjusting system and has an essential objective to provide a... Read More
Inventors: Goto, Naomi; Kurahashi, Yasufumi;, Assignee: Matsushita Electric Industrial Co., Ltd. (Osaka-fu, JP) |
Temperature-measuring device
We claim: 1. A temperature-measuring device comprising: an elongated housing having a closed end; a body of refractory material in said housing; a noise-thermometer coil in said housing adjacent said ... Read More
Inventors: Brixy, Heinz;, Assignee: Kernforschungsanlage Julich Gesellschaft mit beschrankter Haftung (Julich, DT) |
Temperature sensor utilizing thermal noise and thermal couple elements, and associated connecting cable
we claim: 1. A temperature sensor comprising: a metallic protective casing; a resistive element generating a temperature-dependent noise voltage and disposed within said casing and having at least one... Read More
Inventors: Brixy, Heinz; Hoewener, Hubert;, Assignee: Kernforschungsanlage Julich GmbH (Julich, DE) |
Apparatus for and method of rapid testing of semiconductor components at elevated temperature
OF PREFERRED EMBODIMENTS The making and use of the presently preferred embodiments are discussed below in detail. However, it should be appreciated that the present invention provides many applicable... Read More
Inventors: Tigelaar, Howard L.; Moslehi, Mehrdad M.;, Assignee: Texas Instruments Incorporated (Dallas, TX) |
Method of controlling temperature of susceptor
It is an object of the present invention to minimize consumption of a susceptor refrigerant. It is another object of the present invention to minimize a cold loss from a susceptor in loading/unloading... Read More
Inventors: Kazama, Kouichi; Komino, Mitsuaki; Ishikawa, Kenji; Ueda, Yoichi;, Assignee: Tokyo Electron Limited (Tokyo, JP) |
Wafer heating chuck with dual zone backplane heating and segmented clamping member
OF THE DRAWINGS FIG. 1 is an axial cross-sectional view of a wafer heating chuck 10 constructed in accordance with an embodiment of the invention. The heating chuck 10 includes a backplane 11 for mou... Read More
Inventors: Jelinek, Vaclav;, Assignee: Sony Corporation (Tokyo, JP); Materials Research Corp. (Orangeburg, NY) |
Heating and cooling apparatus for reaction chamber
OF PREFERRED EMBODIMENTS FIG. 1 is a schematic drawing illustrating a RIE unit according to one embodiment of the present invention. RIE unit 10 includes a treatment chamber 12, the interior of which... Read More
Inventors: Kawamura, Hideki; Yamamoto, Hirochika; Nishikawa, Yukinobu;, Assignee: Teisan Kabushiki Kaisha (Tokyo, JP) |
Lighting 
