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Home Liquid Purification Method-for-recovering-etchant-from-etching-waste-liquid-containing-iron-chloride

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 Method for recovering etchant from etching waste liquid containing iron chloride

Details
Inventors: Inoshita, Tsutomu; Kitazawa, Tadao; Matsumoto, Hiroyuki; Nagashima, Masaki; Yoshino, Hiroshi; Nagaoka, Yonejiro; Mito, Katsumasa;
Assignee: Astec Irie Co., Ltd. (Fukuoka, JP)
Primary Examiner: Andrews; Melvyn
Assistant Examiner:
Attorney, Agent or Firm: Armstrong, Westerman, Hattori, McLeland & Naughton

Method for recovering etchant from etching waste liquid 11 containing iron chloride is disclosed, wherein iron powder is mixed with iron chloride waste solution containing metal ions having a lesser ionization tendency than iron ion in an mixing vessel so as to cause a reaction between the iron powder and the metal ions and remove the precipitated metal from the iron chloride waste solution. The etching waste liquid 11 containing iron chloride or the iron chloride waste liquid which is an intermediate of the etching waste liquid 11 containing iron chloride is supplied to the mixing vessel from the bottom of the mixing vessel, an iron-powder processed liquid which comes up through a fluidized bed is continuously taken out from the mixing vessel and is returned to the bottom portion of mixing vessel so as to form the fluidized bed in the mixing vessel, and metal ions having the lesser ionization tendency than iron ion are removed from the etching waste liquid 11 containing iron chloride or the iron chloride waste liquid to produce the iron-powder processed liquid.

DETAILED DESCRIPTION We claim: 1.
Method for recovering etchant from etching waste liquid containing iron chloride, the method comprising mixing iron powder with iron chloride waste solution containing metal ions having lesser ionization tendency than iron ion in a mixing vessel so as to cause a reaction between the iron powder and the metal ions and precipitate metals, removing precipitated metals from iron chloride waste solution to produce iron-powder processed liquid, and oxidizing the iron-powder processed liquid, wherein the iron chloride waste solution is supplied to the mixing vessel and a part of the iron-powder processed liquid is taken out from an upper portion of the mixing vessel and is returned to a bottom portion of the mixing vessel so as to form a fluidized bed in said mixing vessel which holds the iron powder in the fluidized bed in a dispersed and floating state, and an excess amount of the iron-powder processed liquid is taken out from the upper portion of the mixing vessel.
2.
Method for recovering etchant from etching waste liquid containing iron chloride according to claim 1, wherein the iron chloride waste solution is supplied to the mixing vessel from the bottom portion of the mixing vessel to facilitate the formation of the fluidized bed.
3.
Method for recovering etchant from etching waste liquid containing iron chloride according to claim 1, wherein an iron powder separating portion is formed at the upper portion of the mixing vessel which has a transverse cross sectional area greater than that of a fluidized bed forming portion at the bottom portion of the mixing vessel where the fluidized bed is formed, wherein the speed of the lifting flow in the mixing vessel is decelerated so that the lifting of the iron powder dispersed and floating bed is restricted.
4.
Method for recovering etchant from etching waste liquid containing iron chloride according to claim 1, further including subjecting an etching waste liquid containing iron chloride to an electrolyzing processing such that a part of or whole ferric ion in the etching waste liquid is reduced to the ferrous ion to produce a reduced iron chloride solution which is used as the iron chloride waste solution supplied to and processed in the mixing vessel



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