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 Optical component having waveguides extending from a common region

Details
Inventors: Qian, Wei; Feng, Dazeng; Zheng, Dawei; Fong, Joan Yiqiong; Shao, Zhian; Chung, Lih-Jou; Yin, Xiaoming;
Assignee: Kotura, Inc. (Monterey Park, CA)
Primary Examiner: Mills; Gregory
Assistant Examiner: Culbert; Roberts
Attorney, Agent or Firm: Gavrilovich; Dodd & Lindsey; LLP; Dodd, Travis;;

A method of forming an optical component includes forming a first mask on an optical component precursor. The first mask is formed with a plurality of waveguide portions extending from a common portion. Each waveguide portion is positioned so as to protect a waveguide region of the optical component precursor where a waveguide is to be formed. The method also includes forming a second mask between waveguide portions of the first mask. The resistance of the second mask to etching varies along at least one dimension of the second mask.

DETAILED DESCRIPTION The invention relates to an optical component.
The optical component includes waveguides extending from a common region.
The optical component also includes a tapered region extending from the common region between the waveguides.
The tapered region has a thickness that tapers in a direction moving away from the common region.
When the tapered region is not present, a light signal incident on the portion of the common region located between the waveguides is reflected or scattered.
The taper of the tapered region can be selected such that the light signal is directed into one of the waveguides rather than being scattered or reflected.
Because the light signal is directed into a waveguide, the optical component is associated with a reduced level of optical loss compared to prior structures.
FIG.
1A through FIG.
1F illustrate an optical component 10 having a plurality of waveguides 12 extending from a common region 14.
FIG.
1A is a topview of the optical component 10.
FIG.
1B is a longitudinal cross section of the optical component 10.
A longitudinal cross section is taken along a line extending between the waveguides 12.
For instance, FIG.
1B is a cross section taken along a line between the brackets labeled B.
FIG.
1C is a lateral cross section of the optical component 10 taken along a line between the brackets labeled C.
FIG.
1D is a lateral cross section of the optical component 10 in FIG.
1A taken along a line between the brackets labeled 1D.
FIG.
1E is a lateral cross section of the optical component 10 in FIG.
1A taken along a line between the brackets labeled E.
FIG.
1F is a lateral cross section of the optical component 10 in FIG.
1A taken along a line between the brackets labeled F.
The optical component 10 includes a light transmitting medium 16 positioned on a base 18.
Suitable light transmitting media include, but are not limited to, silicon.
Although not illustrated, a cladding can optionally be positioned on the light transmitting medium 16.
The light transmitting medium 16 includes ridges 20 extending from a slab 22



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