 Manufacture of MEMS structures in sealed cavity using dry-release MEMS device encapsulation |
| In general, the invention disclosed refers to gas phase release of any number of microstructure ... |
|
| Magnetoresistive element and magnetic memory device |
| OF THE INVENTION Basic structures of magnetoresistive elements according to the present invention ... |
|
| Method of fabricating DRAM capacitor |
| It is therefore the object of the invention to provide an improved and simplified method of ... |
|
| 8-beam bridge-type silicon acceleration sensor and the fabricating method thereof |
| OF THE PREFERRED EMBODIMENT For a better understanding of the present invention, together with ... |
|
| Transducer having a resonating silicon beam and method for forming same |
| The invention provides apparatus including a force transducer having a resonating beam that is ... |
|
| Method of manufacturing an electronic part having an air-bridge interconnection |
| In view of the aforementioned problems, an object of the present invention is to provide an ... |
|
| High frequency semiconductor device |
| A high frequency semiconductor device of the present invention includes: a substrate having a ... |
|
| Method for manufacturing an SOI wafer |
| The present invention, in one aspect, provides a method for manufacturing SOI wafers, which ... |
|
| Polymer based tunneling sensor |
| The present invention includes a process for fabricating a polymer based micro-machine by the ... |
|
| Solid-state imaging device |
| It is an object of the present invention to provide a highly sensitive solid-state imaging device ... |
|
|
Airbag system using three-dimensional acceleration sensor
| Details |
Inventors: Yokota, Yoshihiro; Koide, Akira; Matsumoto, Masahiro; Hayashi, Masahide;
Assignee: Hitachi, Ltd. (JP)
Primary Examiner: Culbreth; Eric D.
Assistant Examiner:
Attorney, Agent or Firm: Evenson, McKeown, Edwards & Lenahan, P.L.L.C.
A three-dimensional acceleration sensor capable of detecting a small acceleration value and even an acceleration value amounting up to 100 G occurring in the event of a collision has a diaphragm for linking a frame and a massive part, and diaphragms and beams for linking the massive part and a central part. These elements are formed by working a single crystalline silicon plate. Gaps between the massive part and opposing electrodes are changed by acceleration applied to the massive part. A circuit connected to terminals detects the changes in gaps as changes in capacitances and determines direction and level of the applied acceleration. |
|
DETAILED DESCRIPTION The present invention relates to a three-dimensional acceleration sensor which can be used for an airbag actuated in the event of a collision of such a moving body as an automobile and for an active suspension in car body control.
A conventional three-dimensional acceleration sensor is described in, for example, 91CH2817-5/91, IEEE, 1991, pp.
655-658.
The conventional sensor is finely worked through surface micro-machining.
Structurally, it has a massive part, and a central part provided inside the massive part, and the massive part is suspended by the central part and thin beams.
Since in the conventional apparatus the central part and the massive part are linked by only the thin beams, the sensor faces a problem of poor strength and is allowed to detect only acceleration values of approximately 1 G to 2 G.
Also, in the conventional sensor, the structure of gap and movable electrode is set up by removing all superfluous layers and consequently the gap is exposed externally, raising a problem that inflow of dirts and moisture to the electrode is inevitable.
An object of the present invention is to provide a three-dimensional acceleration sensor capable of detecting a large value of acceleration.
Another object of the invention is to provide a three-dimensional acceleration sensor which is constructed such that electrodes can be prevented from being deposited with dirts and the like.
To accomplish the above objects, in a three-dimensional acceleration sensor having a support on which a stationary electrode is arranged, a central part fixed to the support, a massive part acting as a movable electrode and a link member for interconnecting the central part and the massive part, the link member is comprised of a combination of diaphragms and beams which are provided around the central part.
Also, to accomplish the above objects in accordance with the present invention, in a three-dimensional acceleration sensor having a support on which a stationary electrode is arranged, a central part fixed to the support, a massive part acting as a movable electrode and a first link member for interconnecting the central part and the massive part, a frame is provided around the massive part, and the frame and the massive part are linked by a second link member comprised of a diaphragm
|
| Related patents |
|
|
Method for fabricating a head/slider assembly integrated with a track-following micro actuator
It is, therefore, a primary object of the present invention to provide a head/slider assembly integrated therein a track-following micro actuator to allow it to be used ...
|
|
|
Low voltage micro-mirror array light beam switch
OF PREFERRED EMBODIMENTS OF THE INVENTION FIG. 1a discloses a sample array of 16 micro-mirrors 6 with actuators 1a on silicon substrate 5. FIG. 1b is an isometric view ...
|
|
|
Long-wavelength semiconductor light emitting device and its manufacturing method
It is therefore an object of the present invention to provide a long-wavelength semiconductor light emitting device having excellent characteristics and a long lifetime, ...
|
|
|
Method of producing a diaphragm on a substrate
We claim: 1. A method of producing on a substrate a diaphragm which is electrically isolated from the substrate, comprising the steps of: (a) obtaining a substrate ...
|
|
|
MEMS sensor structure and microfabrication process therefor
The present invention provides a micro-electro-mechanical sensor structure with an improved design comprising rigid interdigitated projections forming capacitive plate ...
|
|
|
Electromechanical memory array using nanotube ribbons and method for making same
Preferred embodiments of the invention provide new electromechanical memory arrays and methods for making same. In particular, electromechanical memory cells are ...
|
|
|
Silicon light emitting device and a method of making the device
OF THE INVENTION Referring to the Figures, a light emitting device 10 comprises a substrate 12 having first and second major surfaces 14 and 16 respectively; a region 18...
|
|
|
Trench isolation method
Therefore, it is an object of the present invention to provide a trench isolation method which avoids the need for a densification process for densifying the insulating ...
|
|
|
Optical device, optical module, semiconductor apparatus and its manufacturing method, and electronic apparatus
It is an object of the invention to provide a method of achieving an electrical connection between stacked semiconductor substrates with ease and high reliability as ...
|
|
|
Method for producing a radiation-emitting semiconductor chip
It is accordingly an object of the invention to provide a method for producing a radiation-emitting semiconductor chip that overcomes the above-mentioned disadvantages ...
|
|
|
MEMS 
