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Home MEMS Amorphic-diamond-material-produced-by-laser-plasma-deposition

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 Amorphic diamond material produced by laser plasma deposition

Details
Inventors: Collins, Carl B.; Davanloo, Farzin;
Assignee: Board of Regents The University of Texas System (Austin, TX)
Primary Examiner: Lawrence; Evan
Assistant Examiner: Padgett; Marianne L.
Attorney, Agent or Firm: Arnold, White & Durkee

A method and apparatus are disclosed for producing amorphic or ultra fine-grained, diamond-like material on a substrate. Uniform, high quality dehydrogenated diamond-like material is produced when a hardened target material is used and/or when a laser beam strikes the target at non-perpendicular angles of incidence. Also, selective placement of particles upon a substrate as well as simultaneous cleaning of the substrate is achieved by a secondary electrode placed within the laser beam path of travel between a first electrode and the substrate.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Turning to the drawings, an apparatus in accordance with the present invention is illustrated.
Broadly speaking, apparatus 10 includes laser beam 12 which enters sealed chamber 14 via one or more windows 16.
Reflecting mirror 18 disposed within chamber 14 is used to reflect incoming beam 12 toward focusing lens 20.
Lens 20 functions to focus beam 12 onto target 22.
Substrate 24 is situated within chamber 14 to collect the layer of material produced by apparatus -0.
In the illustrated embodiment, a Nd-Yag laser is preferably used to deliver laser beam 12, as schematically illustrated in FIG.
1.
The Nd-Yag laser is operated in the Q-switch mode to deliver 250 millijoules at the focus point with a repetition rate of 10 Hz.
A Molectron MY34-10 laser has been satisfactorily used.
The present invention postulates that the power density delivered to target 22 is an important parameter in obtaining the best layer of material.
It is believed that the focusing mechanism 20 is an important ingredient in achieving the desirable power densities as the actual output of laser beam 12.
Chamber 14 includes one or more windows 16 for observing and applying the laser.
Chamber 14 includes a cylindrical shell of sufficient rigidity to withstand vacuum forces when chamber 14 is evacuated to about 1.
times.
10.
sup.
-6 Torr.
Although not illustrated, it is important to note that reflecting mirror 18, focusing mechanism 20, substrate 24, target 22, etc.
are all rigidly secured within chamber 14.
Reflecting mirror 18 includes a highly reflective, smooth surface for redirecting the path of travel of laser beam 12 in chamber 14.
The illustrated mirror is a 45.
degree.
reflector, Part No.
Y1-15-45 made by CVI Laser Corporation of Albuquerque, New Mexico.
Focusing lens 20 includes a lens which receives the directed laser beam and focuses the beam to a focal point on target 22.
The illustrated lens is a plano-convex lens, Part No.
PLCX-25.
4/39.
2 made by CVI Laser Corporation



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