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Blazed grating light valve
| Details |
Inventors: Amm, David T.; Trisnadi, Jahja; Hunter, James; Gudeman, Christopher; Maheshwari, Dinesh;
Assignee: Silicon Light Machines Corporation (Sunnyvale, CA)
Primary Examiner: Mills; Gregory
Assistant Examiner: Culbert; Roberts
Attorney, Agent or Firm: Okamoto & Benedicto LLP
A light modulator includes elongated elements arranged parallel to each other. In a first diffraction mode, the light modulator operates to diffract an incident light into at least two diffraction orders. In a second diffraction mode, the light modulator operates to diffract the incident light into a single diffraction order. Each of the elongated elements comprises a blaze profile, which preferably comprises a reflective stepped profile across a width of each of the elongated elements and which produces an effective blaze at a blaze angle. Alternatively, the blaze profile comprises a reflective surface angled at the blaze angle. Each of selected ones of the elongated elements comprise a first conductive element. The elongated elements produce the first diffraction when a first electrical bias is applied between the first conductive elements and a substrate. A relative height of the blazed portions are adjusted to produce the second diffraction when a second electrical bias is applied between the first conductive elements and the substrate. In an alternative embodiment, each of the elongated elements includes the first conductive element and multiple elongated elements are arranged in groupings, where each of the groupings includes at least three of the elongated elements. When the multiple elongated elements are at a first height, the incident light reflects from the elongated elements. When relative heights of the multiple elongated elements are adjusted by applying individual electrical biases between the first conductive elements and the substrate, the incident light diffracts into the single diffraction order. |
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DETAILED DESCRIPTION The present invention is a light modulator.
The light modulator includes elongated elements arranged parallel to each other and suspended above a substrate.
The light modulator operates in a first diffraction mode and in a second diffraction mode.
In the first diffraction mode, an incident light diffracts into at least two diffraction orders.
In the second diffraction mode, the incident light diffracts into a single diffraction order, which is at a diffraction angle different from diffraction angles for the at least two diffraction orders.
Each of the elongated elements comprises a blaze profile.
Preferably, the blaze profile comprises a stepped profile across a width of each of the elongated elements where the blaze profile produces an effective blaze at a blaze angle.
Alternatively, the blaze profile comprises a surface angled at the blaze angle.
Each blaze profile comprises a reflective surface.
Each of selected ones of the elongated elements comprise a first conductive element along the elongated element.
The elongated elements are coupled to the substrate.
The substrate comprises a second conductive element.
The elongated elements produce the first diffraction when a first electrical bias, preferably a zero electrical bias, is applied between the first conductive elements of the selected ones of the elongated elements and the second conductive element.
A relative height of the blazed portions are adjusted to produce the second diffraction when a second electrical bias is applied between the first conductive elements of the selected ones of the elongated elements and the second conductive element.
In an alternative embodiment, multiple elongated elements are arranged in groupings.
Each of the groupings includes at least three of the elongated elements and each grouping includes an identical number of the elongated elements.
Each of the elongated elements in the alternative embodiment includes the first conductive element.
When the multiple elongated elements of each of the groupings are at a first height, the incident light reflects from the elongated elements
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MEMS 
