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Distributed constant element using a magnetic thin film
| Details |
Inventors: Mizoguchi, Tetsuhiko; Inoue, Tetsuo; Sato, Toshirou;
Assignee: Kabushiki Kaisha Toshiba (Kawasaki, JP)
Primary Examiner: Pascal; Robert
Assistant Examiner: Summons; Barbara
Attorney, Agent or Firm: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
The present invention is directed to a magnetic thin-film device whose operating frequency band ranges from several millihertz (MHz) to several gigahertz (GHz) and which is used as an inductor for a switching power supply, a noise filter, a reception circuit for receiving a quasi-microwave and a magnetic sensor. In this device, uniaxial magnetic anisotropy is guided to a magnetic layer, and the magnetic layer is sandwiched between dielectric layers to form a propagation path of electromagnetic wave. A microstrip line is provided on the top surface of the propagation path, while an insulative underlying substrate is formed on the bottom surface thereof with a lower grounded conductor interposed therebetween. Thus, the wavelength of the propagation path can be shortened to miniaturize the device. The device is rapidly improved in characteristics and miniaturized further, resulting in reduction in manufacturing costs. |
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DETAILED DESCRIPTION As described above, the development and practicability of a magnetic thin-film device are delayed.
It is desired that the device be improved rapidly in characteristics (performance), miniaturized (thinned) further, and decreased in manufacturing cost.
It is accordingly an object of the present invention to provide a distributed constant element improved characteristics (performance), decreased in size (thickness) and of reduced manufacturing cost in accordance with the development and practicability of various types of magnetic thin-film devices.
To attain the above object, according to a first aspect of the present invention, there is provided a distributed constant element comprising a soft magnetic metal layer, and conductor layers provided so as to sandwich the soft magnetic metal layer, a dielectric layer being interposed between the soft magnetic metal layer and each of the conductor layers.
According to a second aspect of the present invention, there is provided a distributed constant element comprising a soft magnetic metal layer having uniaxial magnetic anisotropy, conductor layers provided so as to sandwich the soft magnetic metal layer, and a dielectric layer being interposed between the soft magnetic metal layer and each of the conductor layers.
According to a third aspect of the present invention, there is provided a distributed constant element comprising a conductor layer, soft magnetic metal layers provided so as to sandwich the conductor layer, and a dielectric layer being interposed between the conductor layer and each of the soft magnetic metal layers.
According to a fourth aspect of the present invention, there is provided a distributed constant element comprising a conductor layer, soft magnetic metal layers provided so as to sandwich the conductor layer, and a dielectric layer being interposed between the conductor layer and each of the soft magnetic metal layers.
According to a fifth aspect of the present invention, there is provided a microstrip line type distributed constant element comprising a lower conductor layer provided on an insulative substrate, a soft magnetic metal layer formed on the lower conductor layer with a dielectric layer interposed therebetween, and having uniaxial magnetic anisotropy, and an upper conductor layer formed on the soft magnetic metal layer with a dielectric layer interposed therebetween
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MEMS 
