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Method for making an all-silicon capacitive pressure sensor
It is an object of this invention to provide an improved method for fabricating an all-silicon monolithic capacitive pressure sensor. It is another object of this ...
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Microfabricated ultrasonic immersion transducer
It is an object of the present invention to provide an immersion microfabricated ultrasonic transducer. It is a further object of the present invention to provide a ...
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Method for making a wafer-pair having sealed chambers
We claim: 1. A method for making a wafer-pair having deposited layer plugged sealed chambers, comprising: growing a thermal layer on a first side of a first silicon ...
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Method to produce germanium layers
It is an object of the invention to provide an improved method for producing germanium or other layers of large area. In a first aspect, the present invention provides a ...
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Method of crystallizing amorphous material with a moving energy beam
We claim: 1. A method of converting solid amorphous material to a more crystalline state comprising the steps of: (a) heating a portion of said material with energy from ...
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Method for fabricating semiconductor device and method for producing liquid crystal display apparatus
A method for fabricating a semiconductor device according to the invention includes the steps of forming a semiconductor film containing silicon, implanting impurity ...
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Laser processing method of semiconductor device
However, it is very difficult for only the laser annealing to produce a crystalline silicon film having such a large mobility as is required for a liquid crystal display ...
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Method for producing insulated gate thin film semiconductor device
The object of the present invention is to prevent such the deterioration, and to provide a method for producing an insulated gate semiconductor device having less ...
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Transparent solar cell and method of fabrication
The present invention provides improved devices such as transparent solar cells and optical filters. It also provides improved methods for forming those devices. In ...
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Laser heat treatment method, laser heat treatment apparatus, and semiconductor device
A laser heat treatment method according to one aspect of the present invention comprises the steps of: forming a laser beam generated from a pulse laser source having a ...
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