|
|
Method for making a piezoresistive pressure sensor of semiconductor material employing anisotropic etching
In order to attain this object in the semiconductor device in accordance with the invention, an annularly structured conducting intermediate layer which has a ...
|
|
|
Integrated microchip genetic testing system
The present invention is a miniaturized thermal cycling device and an integrated, unitary microchip based detection device with microfluidic controls, on chip ...
|
|
|
Microelectronic mechanical system and methods
OF THE INVENTION In general, the present invention provides a method to make devices with encapsulated release structures. The current invention is particularly useful ...
|
|
|
Manufacturing method of electro-optical device substrate and manufacturing method of electro-optical device
What is claimed is: 1. A method for manufacturing an electro-optical device substrate, comprising: an exposure step of exposing a photosensitive resin disposed on a ...
|
|
|
Method of making an integrated electromechanical switch and tunable capacitor
The present invention is directed to a low-loss micro-electromechanical microwave switch and a micro-electromechanical tunable capacitor monolithically integrated with ...
|
|
|
Method for manufacturing group III-V compound semiconductors
It is an object of the present invention to provide a formation method whereby creation of strain and defects in the substrate and epitaxial layer are minimized, even ...
|
|
|
Bump style MEMS switch
In accordance with some embodiments of the present invention, a microelectromechanical system (MEMS) switch is formed which uses what may be called a bump configuration....
|
|
|
Optical probe having a refractive index micro-lens and method of manufacturing the same
In view of the above identified problems, it is therefore an object of the present invention to provide an optical probe comprising a cantilever, a projection having a ...
|
|
|
Pressure detecting device
Therefore, the present invention has been implemented in view of the foregoing problems, and has a first object to provide a pressure detecting device having a proper ...
|
|
|
Base-soluble polyimide release layers for use in microlithographic processing
AND PREFERRED EMBODIMENTS The release layer compositions of the present invention are generally derived from the polyamic acid chemistry depicted at FIG. 7 but with ...
|